Optical coatings and associated methods
A technology for optical coatings and substrates, applied in coatings, optics, optical components, etc., to solve problems such as instability
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[0037] An example of a TiXO compound is Ti-Si-O. Titanium and silicon are immiscible in their oxidized state and form a solids-free solution. The Ti-Si-O compound is deposited on the glass using a co-sputtering process. While the other sputter targets were coated with silicon, one sputter target was coated with titanium, the pressure was 3.25 mtorr, and the process plasma consisted of 40 sccm oxygen and 35 sccm argon. A 643 angstrom film with 0% silicon dioxide atomic percent and 100% titanium dioxide atomic percent was deposited on a titanium sputtering target using a power of 5.0 kW and the substrate was sputtered in three passes at a pass rate of 6.2 hours / minute machine. And a 742 angstrom film with 13 atomic percent silicon dioxide and 87 atomic percent titanium dioxide was deposited using 5.0 kW for a titanium sputtering target and 0.3 kW for a silicon sputtering target, and the substrate Three passes through the spray machine at a rate of 6.2 hrs / min. Additionally, ...
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