Turning device for heavy object
A technology of a rotating device and a driving device, which is applied to the transmission device, gear transmission device, electromechanical device, etc., can solve the problems of complicated device, increased cost, and inability to reduce the turning radius of the test head.
Active Publication Date: 2008-10-29
TOKYO ELECTRON LTD +1
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- Application Information
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Problems solved by technology
[0003] However, in the structure in which the weight of the test head is supported by the motor and the gears like the existing inspection devices such as detection devices, the gears for transmitting the driving force of the motors are enlarged and the gears have a multi-stage structure, which makes the device complicated and cumbersome. Increased costs
In addition, the rotation radius of the test head cannot be reduced due to the rotation of the oversized gear, and there is a problem that the installation space of the detection device increases.
Method used
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Embodiment Construction
[0027] Hereinafter, embodiments of the weight rotating device of the present invention will be described in detail with reference to the accompanying drawings.
[0028] For example figure 1As shown, the detection device 1 is composed of: a detection device main body (hereinafter referred to as "device main body") 2, which constitutes a detection part for electrical inspection of an object to be inspected, such as a semiconductor wafer; Arranged adjacently on the left side; a test head 5 as a weight, which is rotated approximately 180 degrees between the device main body 2 and the maintenance area 4 through the stand 3 ; a connecting ring 7 ; and a probe card 8 . Also, on the right side of the apparatus main body 2 is disposed a semiconductor wafer transfer device 9 that stores semiconductor wafers in units of cassettes and loads and unloads semiconductor wafers one by one from the cassettes to the probe.
[0029] In addition, a probe card 8 is provided in the central hole (no...
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A compact turning device for a heavy object, comprising a turning arm (11) joined to the heavy object (5) and a drive device (12) drivingly turning the turning arm (11). The drive device (12) further comprises a motor incorporating a rotor shaft connected to the rotating input part of a planetary gear type speed reducer on a same axis (A). Also, the turning arm (11) is installed by joining its first plane to the plane of the planetary gear type speed reducer forming the rotating output part and its second plane orthogonal to the first plane to the heavy object. The turning arm (11) and the drive device (12) are disposed within the width (D) of the heavy object (5) in the axis (A) direction of the turning pivot of the turning arm (11). The planetary gear type speed reducer of the drive device (12) may be disposed in two front and rear stages.
Description
technical field [0001] The present invention relates to a heavy object rotating device, which is applied to a detection device for measuring the electrical characteristics of a test object such as a semiconductor device, and is used for rotating a heavy object such as a test head. Background technique [0002] A conventional inspection device, for example, a detection device includes: a loading unit having a transport mechanism for transporting semiconductor wafers one by one; and a detection unit continuously performing electrical inspections on the semiconductor wafers. The detection part includes: a mounting table, which transfers semiconductor wafers one by one between the transfer mechanism; a probe card, which is arranged above the mounting table; and a test head, which electrically cuts off the probe card from the test chip. between devices. The test head is fixed to the rotation axis through the test head frame and the hinge, and can rotate, for example, 180 degrees...
Claims
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IPC IPC(8): H01L21/66F16H1/46G01R31/28H02K7/116
Inventor 秋山收司弓达利博山田浩史龟田修宏
Owner TOKYO ELECTRON LTD