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Substrate positioning device and storing unit

A positioning device and storage unit technology, applied in electrical components, transportation and packaging, lighting and heating equipment, etc., can solve the problem of limited miniaturization of the load lock chamber, and achieve the goal of avoiding gigantic, accurate positioning, and reducing the installation space. Effect

Active Publication Date: 2008-12-24
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the technology of the above-mentioned Patent Document 1, since a pair of rollers are supported on the supporting body to constitute the positioner, it has to be a relatively large device itself, but for its movement in the diagonal direction and the vertical direction , part of the space is necessary, so there is a limit to the miniaturization of the load lock chamber

Method used

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  • Substrate positioning device and storing unit
  • Substrate positioning device and storing unit
  • Substrate positioning device and storing unit

Examples

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Embodiment Construction

[0031]Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. Here, an example in which the substrate positioning device of the present invention is used in a load lock device constituting a multi-chamber plasma processing apparatus for performing plasma processing on a glass substrate for FPD (hereinafter simply referred to as "substrate") S will be described. . Here, examples of the FPD include a liquid crystal display (LCD), a light emitting diode (LED) display, an electroluminescence (Electro Luminescence; EL) display, a fluorescent display tube (Vacuum Fluorescent Display; VFD), a plasma display panel ( PDP) etc.

[0032] 1 is a perspective view schematically showing a plasma processing apparatus in which a substrate positioning device according to an embodiment of the present invention is applied to a load lock chamber, figure 2 It is a horizontal cross-sectional view schematically showing the interior.

[0033] In...

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Abstract

A substrate position setting apparatus and a substrate holding unit are provided to minimize a predetermined space around a substrate in a chamber by using a driving force converting mechanism. A substrate position setting apparatus includes a pair of first pressurizing units(7) and a pair of second pressurizing units(8). The first and second pressurizing units include a driving mechanism and a pressurizing part(70,80) driven by the driving mechanism, respectively. At least one out of the first pressurizing units includes a driving force converting mechanism.

Description

technical field [0001] The present invention relates to a substrate positioning device for positioning a substrate such as a glass substrate for a flat panel display (FPD), and a substrate storage unit provided with the substrate positioning device. Background technique [0002] In the FPD manufacturing process, a so-called multi-chamber equipped with a plurality of vacuum processing chambers for performing processes such as etching, ashing, and film formation on a glass substrate in a vacuum state is used. type of vacuum treatment device. [0003] In such a vacuum processing apparatus, in order to load / unload substrates in the vacuum processing chamber, it is not necessary to return the vacuum processing chamber to normal pressure every time, but the gate valve is used to pass through the opening that can be opened and closed freely, so that the load as the preliminary vacuum chamber The lock chamber is connected to the vacuum processing chamber. The pre-processed substra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68H01L21/677B65G49/06
CPCG02F1/1303H01L21/67201H01L21/68
Inventor 羽立良幸
Owner TOKYO ELECTRON LTD