Mini-sensor for human breathing

A breathing sensor, human technology, applied in the field of sensor technology products, can solve problems such as difficult high precision, low cost miniaturization, array, difficult cost performance, and inability to monitor the dynamic characteristics of human breathing, achieving high sensitivity, signal-to-noise The effect of high ratio and simple structure

Inactive Publication Date: 2009-06-03
SHANGHAI JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

The article uses a sensor array to detect the component information in human breath as the basis for diagnosing diabetes, but this technology cannot monitor the dynamic characteristics of human breath
Sensors for monitoring the dynamic characteristics of human breathing have long been used in the long-term monitoring and analysis of pathological changes in patients and in nursing technology, and in the monitoring and analysis of human psychological conditions such as lie detectors. The sensors are all based on the moisture, heat, airflow or chest movement released to the surrounding environment during human breathing to achieve signal conversion as the input of the sensor. They belong to the principle of piezoelectricity, thermoelectricity or the principle of barometer and airflow meter, most of which are based on the above principles It is difficult to manufacture sensors using semiconductor processing technology, so it is difficult to realize miniaturization and array formation with high precision and low cost, and it is difficult to improve cost performance

Method used

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Effect test

Embodiment 1

[0022] Such as figure 1 As shown, the present invention includes: a substrate 1 , a microelectrode or its array layer 6 , and the microelectrode or its array layer 6 is a metal microelectrode or its array layer 2 , which is arranged on the substrate 1 . Metal microelectrodes or arrays thereof In layer 2, metal microelectrodes or arrays thereof are separated from each other by air spaces.

[0023] The surface of the substrate 1 has high insulating properties, and it can be glass, or a silicon wafer with an insulating layer on top, and the material of the insulating layer can be silicon dioxide, silicon nitride, or other insulating substrates.

Embodiment 2

[0025] Such as image 3 Shown, the present invention comprises: substrate 1, microelectrode or its array layer 6, and described microelectrode or its array layer 6 is the metal microelectrode or its array layer 2 of surface covering one-dimensional nano material layer 4, metal microelectrode or its array layer 6 The electrodes or their array layer 2 are arranged on the substrate 1, the microelectrodes or their array layer 6, and the metal microelectrodes or their arrays are separated from each other by air spaces.

[0026] When working, the anode array 5 and the cathode array 3 are respectively connected to the positive pole and the negative pole of the power supply, so that there is a potential drop between the two poles, and then an electrostatic field is formed in the gap between each two cathode and anode units and in the adjacent area of ​​each unit, When the electric field strength is less than the breakdown field strength of the air, the sensor circuit is in an open cir...

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Abstract

A miniature sensor for human respiration is composed of a substrate, and microelectrodes or their array on said substrate. The positive and negative electrodes of said microelectrodes or their array are isolated from each other by air. Its advantages are high sensitivity and S / N ratio, and low energy consumption.

Description

technical field [0001] The invention relates to a product in the technical field of sensors, in particular to a miniature human breathing sensor. technical background [0002] Monitoring changes in the composition and dynamic characteristics (intensity and frequency) of human respiration is an intrinsically safe method for monitoring changes in human metabolism. At present, the development direction of human respiratory sensor technology is to develop a sensor system that combines static detection and dynamic monitoring of human respiratory metabolism with high safety, stability, high sensitivity, high selectivity, and low energy consumption. Reliable evidence of psychological status. In terms of static statistical feature detection, some great progress has been made since M. Phillips published an article in "Scientific American" in 1992, saying that human physiological and pathological conditions can be analyzed by detecting gas content. [0003] After searching the liter...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61B5/08H01L49/00
Inventor 侯中宇张亚非蔡炳初徐东魏星
Owner SHANGHAI JIAOTONG UNIV
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