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Method for on-line fault diagnosis of etching equipment

A technology for etching equipment and fault diagnosis, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as equipment maintenance sensitivity, difficulty in application, and complexity, achieve sensitive fault monitoring, improve applicability, and avoid complexity. degree of effect

Active Publication Date: 2009-07-01
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

[0008] This method is generally more complicated and requires multivariate statistical analysis knowledge. The establishment of the model needs to be determined according to the results of a large number of experiments, and due to the high sensitivity to process results, the fixed control limit is more sensitive to equipment maintenance. Therefore, in the equipment After maintenance, the model needs to be rebuilt, which is complicated and difficult to apply

Method used

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  • Method for on-line fault diagnosis of etching equipment
  • Method for on-line fault diagnosis of etching equipment
  • Method for on-line fault diagnosis of etching equipment

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Embodiment Construction

[0033] A preferred embodiment of the present invention is, firstly, select a plurality of parameters in the process, and perform mathematical operations on the multiple parameters in the process to obtain new parameters, the amount of change of the new parameters is more obvious than the amount of change of a single parameter ; Then, set the control limit as required, and judge the operating state of the etching equipment according to the new parameter and the control limit; if the new parameter value exceeds the control limit, it is judged that the etching equipment is in a fault state.

[0034] Such as Figure 2(a) , 2(b) , 2(c), select the first parameter and the second parameter, where the first parameter decreases with the increase in the number of silicon wafers processed, assuming that this decrease is a fault state, it is necessary to increase its variation for early Fault states are found and processed to avoid scrapping silicon wafers. At this time, a second parame...

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Abstract

The invention discloses a method for online fault diagnosis of etching equipment. The amount of change is more obvious than that of a single parameter; then, set the control limit according to the need, and judge the operating status of the etching equipment according to the new parameter and control limit. In this process, if the parameter gradually increases or decreases gradually or the change trend of the mutation belongs to the normal process range, it is corrected so that the change trend of the new parameter is close to the level, and the control limit is set on both sides of the level change trend of the new parameter , so that the fault data points change significantly to obtain more sensitive process monitoring.

Description

technical field [0001] The invention relates to a method for fault diagnosis of a technological process, in particular to a method for online fault diagnosis of etching equipment. Background technique [0002] When the semiconductor silicon wafer (wafer) processing technology develops below 90nm, more and more device units are integrated on each silicon wafer, and the cost of each silicon wafer increases accordingly. In order to effectively improve the quality rate and avoid the generation of waste wafers, more and more 300mm silicon wafer processing factories use APC (Advanced Process Control, Advanced Process Control) to detect problems in the silicon wafer processing process in time, and timely correct Silicon wafer processing quality control. An important part of advanced process control is fault diagnosis and classification, that is, in the process of silicon wafer processing, real-time monitoring process data, including hardware information involved in the process, us...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/66
Inventor 陈卓李荣甫张善贵
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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