Growth silicon based thin film and PECVD equipment for high-efficiency silicon based thin-film solar cell

Abstract

A PECVD device for growing silicon-based thin films and high-efficiency silicon-based thin-film solar cells, including a deposition chamber, a gas path control system, an electric control system, and a vacuum unit. The deposition chamber is composed of a growth chamber (1) located in the middle of the deposition chamber and film entry and exit chambers (2) located on both sides of the growth chamber (1). The entry and exit film chamber (2) is equipped with a movable door that can be opened and closed manually. The entry and exit chamber (2) is equipped with an automatic loading and unloading rack for multiple samples. The growth chamber (1) is equipped with four sets of parallel-plate capacitive electrodes for deposition. Each set of parallel-plate capacitive electrodes is composed of two symmetrically arranged upper and lower electrode plates. There is a vertical installation between each set of parallel-plate capacitive electrodes. bezel. The vacuum unit consists of a mechanical pump (3), a condensation filter (4), and a waste gas treatment device (5). The PLC controller of the electronic control system controls the growth process of silicon-based thin film and silicon-based thin film solar cells. The heterogeneity of the silicon-based thin film prepared by the invention is less than 3% (tested and calculated by infrared transmission spectrum method), and the conversion efficiency of the silicon-based thin film solar cell is greater than 9% (test light source: AM1.5; 1000W / M2).

Description

Technical field [0001] The invention relates to equipment for preparing silicon-based thin-film materials and silicon-based thin-film solar cells, in particular to equipment for preparing silicon-based thin-film materials and high-efficiency silicon-based thin-film solar cells by adopting a PECVD method. Background technique [0002] At present, the world is facing energy shortages and environmental degradation, and the development of renewable energy is greatly accelerated. Crystalline silicon solar cells are restricted by the supply of raw materials, making silicon thin-film solar cells more important. However, the current high cost of R&D and production equipment for preparing silicon thin-film solar cells has severely restricted its development speed. There is an urgent need for low-cost silicon thin film battery R&D and production equipment in the market. [0003] Chinese patent CN2404215 provides a PECVD device for making amorphous silicon thin-film solar cells. Such as fig...

AI Technical Summary

Problems solved by technology

Its disadvantages are: each additional isolation room will cost at least 150,000 to 200,000 yuan, and the purpose is only to reduce possible impurity pollution; 2. Extend the growth cycle; 3. Increase the complexity of the operation process

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