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Multichannel coil filter ion composite film plating device and method

A composite coating and filter technology, which is applied in the field of material surface treatment, can solve the problems of the influence of the surface finish of the film layer and restrict the application, and achieve the effect of reducing the pollution of macroscopic large particles

Inactive Publication Date: 2009-10-28
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But it also has a very big disadvantage: the production of large liquid particles
[0003] After searching the literature of the prior art, it was found that Chinese Patent No. 96241767.X, named "Rotary Magnetron Columnar Arc Source-Plane Arc Source Multi-Arc Ion Coating Machine", proposes to place a rotating columnar arc in the center of the coating equipment. source, place one or more planar arc sources on the side wall, select different targets for the arc source, and adjust the coating process to obtain a composite film layer, but because no filter device is used, the surface finish of the obtained film layer is affected and restricted. Its application in optical coatings and other fields requiring high-quality coatings

Method used

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  • Multichannel coil filter ion composite film plating device and method
  • Multichannel coil filter ion composite film plating device and method
  • Multichannel coil filter ion composite film plating device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Two cathodic arc targets use a multi-channel coil filter ion composite coating device with two guiding channels to perform (Ti, Al)N composite film plating

[0027] Such as figure 1As shown, two cathodic arc targets are connected by the structure and circuit of a multi-channel coil filter ion composite coating device with two guiding channels. The dotted box in it represents the vacuum furnace, the inside of the box is a schematic diagram of the furnace device, and the outside of the box is an external circuit. As can be seen from the figure, the device mainly includes a multi-channel free and open coil filter (including two guiding channels 4 and a mixing channel 6), a filter shaping and insulating device 5, a filter positioning device 3, and a workpiece cover 8; The entrances of the two guide channels 4 of the multi-channel free and open coil filter are respectively facing the cathode arc targets 1 and 2, and the outlets are all facing the entrance of the mixing chann...

Embodiment 2

[0040] Plating of TiN / CrN / TiN multilayer structure film with two cathodic arc targets using a multi-channel coil filter ion composite coating device with two guiding channels

[0041] The device of this embodiment is almost exactly the same as that of Embodiment 1, the difference is that: 1) the cathodic arc target uses Ti target and Cr target, so that a multilayer structure film can be obtained; 2) the power supply of the multi-channel free open coil filter Use direct current 600A, can obtain better transmission efficiency with respect to embodiment 1 like this; 3) do not connect the high-power resistance box in series in the circuit, can guarantee like this that the coil in the free open coil filter is in +20V to + with respect to the anode potential 70V; 4) workpiece cover height 150mm, can obtain better filter effect with respect to embodiment 1 like this.

[0042] After the entire device is arranged, the TiN / CrN / TiN multilayer structure film is plated according to the fol...

Embodiment 3

[0048] Two cathodic arc targets use a multi-channel coil filter ion composite coating device with two guiding channels to perform (Ti, Al)N composite film plating

[0049] The device of this embodiment is almost exactly the same as that of Embodiment 1, except that 1) the power supply of the multi-channel coil filter uses DC 400A; 2) the high-power resistance box is not connected in series in the circuit.

[0050] After the entire multi-channel coil filter ion composite coating device is arranged, the (Ti, Al)N composite composition film is plated according to the steps similar to that of Example 1.

[0051] In this embodiment, the current used for the multi-channel coil filter will be greater than that of embodiment 1, and the transmission efficiency obtained will be higher than that of embodiment 1, but the heating value of the entire coil in the free and open coil filter will also be greater than that of embodiment 1 . In addition, when the coil current is 400A, the maximu...

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Abstract

The utility model relates to an ion composite coating device for a multi-channel coil filter, which belongs to the field of coating and material surface modification. The device of the present invention comprises: a multi-channel free and open coil filter, a filter shaping and insulating device, a filter positioning device and a workpiece cover, and the multi-channel free and open coil filter has two or more guiding channels and a Mixing channels, two or more guide channels are symmetrically distributed, their entrances are facing two or more cathodic arc targets, their outlets are facing the inlets of the mixing channels, the outlets of the mixing channels are facing the workpiece, and the workpieces are located in the workpiece cover. The filter shaping and insulating device is clamped between adjacent turns of the coil in the filter, and the filter positioning device fixes the filter in the vacuum furnace. The invention also provides a method for applying the above-mentioned device to carry out ion composite coating. The invention has the advantages of simple implementation, smooth surface of the obtained film, controllable composition and structure, and can be applied to the field of optics and high-precision coating.

Description

technical field [0001] The invention relates to a device and method in the technical field of material surface treatment, in particular to a multi-channel coil filter ion composite coating device and method. Background technique [0002] Ion plating using cathodic arc targets (commonly referred to as multi-arc ion plating or vacuum arc ion plating in the industry) is one of the most widely used coating processes at present. Compared with evaporation, sputtering and other coating processes, It has the advantages of high ionization rate (70%-90%), good membrane-base binding force and high deposition rate. But it also has a very big disadvantage: the production of large liquid particles. These large liquid particles usually have a diameter of about 0.1 μm to 10 μm, and they are mixed in the ion flow and move towards the workpiece at a speed of several m / s to hundreds of m / s. When these large liquid particles are deposited in the film layer, they will form macroscopic particle...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/22C23C14/54
Inventor 沈耀戴华蔡珣胡亚威陈秋龙
Owner SHANGHAI JIAOTONG UNIV
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