Bar type corona discharged electrostatic eliminator equipped with air vessel using pulsed AC high voltage power source, especially easily controlling duty ratio

Abstract

This invention relates to an equipment for eliminating static electricity, more specifically speaking, compared to the voltage applied to the discharging electrode in prior corona discharged electrostatic eliminator is a simple AC High Voltage or DC High Voltage, in this invention, a Pulse AC High Voltage coupled with a signal of square pulse type is applied, and by preparing an air vessel into the equipment and sending air of regular pressure through a minute air nozzle, the equipment of this invention can move the ions to a charged body. The corona discharged electrostatic eliminator of this invention comprises a discharging electrode that generates a corona discharge, a ground electrode that inducts ion generation from the voltage applied discharging electrode, a High voltage unit that generates an AC pulse high voltage and applies it to the discharging electrode, and a controller to control the frequency and Duty Ratio of the AC pulse high voltage, wherein the range of the frequency of the high voltage is from 1 [Hz] to 10[kHz], and the duty ratio is controlled in the 40~60[%] range. The electrostatic eliminator of this invention can eliminate the remaining static electricity of the charged body efficiently regardless of the distance to the charged body through the free control of the frequency and duty ratio of the applied voltage.

Description

technical field [0001] The present invention relates to a static eliminator that moves the generated ions into a charged body by using corona discharge, particularly, by injecting air in an air container with a micro air nozzle to move the ions. Background technique [0002] Generally, a very clean workshop is necessary in producing semiconductors, liquid crystal displays (LCDs), plasma display panels (PDPs), organic ELs, multilayer ceramic capacitors (MLCCs), and the like. However, especially in the process of printing, developing and cleaning them, handling a large amount of highly insulating substances that are liable to be charged with static electricity, at this time, foreign matter such as dust is caused to stick due to static electricity, causing problems such as yield drop, pattern damage, and poor printing . [0003] As described above, in the process of handling highly insulating substances, the need to eliminate static electricity of charged bodies is frequently ...

AI Technical Summary

Problems solved by technology

[0004] However, the AC high voltage form is suitable for eliminating static electricity at a short distance (50mm ~ 300mm) from the charged body, but it is not suitable for eliminating static electricity from the charged body far away.

In addition, the use of high frequency is suitable for eliminating the static electricity of the charged body moving at high speed, but it also has the problem of imbalance between + ions and - ions generated by the static eliminator due to the difference in the amount of + ions and - ions generated, so , cannot completely eliminate residual static

[0005] At the same time, the DC high-voltage form is installed at a long distance of more than 1,000mm from the charged body, and can eliminate the static electricity, so it is mainly used when the installation distance is long, but it is not suitable for short-distance installation

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