Microwave plasm reaction cavity

Abstract

The invention relates to a microwave plasma reaction cavity belonging to the technical field of microwave plasma reaction cavity excitation. The invention includes a hollow cylindrical main cavity body, a hollow cylindrical transition cavity, a gradually changed waveguide, quartz sheet glass and a pull rod. The front end of the main cavity body is communicated with the transition cavity and the front end of the transition cavity is connected with the gradually changed waveguide. The quartz sheet glass is arranged between the gradually changed waveguide and the transition cavity. The pull rod inserts the main cavity body from the back end of the main cavity body to adjust the length of the main cavity body. The invention can acquire air plasma under a high anticyclone with the input of microwave of various frequencies. The cavity has the advantages of low energy consumption and high microwave exchange efficiency.

Description

technical field [0001] The invention belongs to the technical field of microwave plasma excitation, in particular to high pressure (>10 4 Pa) Design of microwave plasma reaction chamber. Background technique [0002] Plasma has strong practical value in the fields of new materials, microelectronics and other industries and biological research, especially the way of using microwaves to excite plasma. Compared with other plasma excitation methods, the existence of plasma is larger. The density of charged particles is high, and in a high-pressure environment (>10 4 Pa) is relatively uniform, and there is a lot of room for application expansion. [0003] At present, ordinary microwave plasma reaction chambers generally use single or mixed microwave modes to generate plasmoids in different chambers. Due to the different design structures, the generated plasmas have different shapes, but their properties are basically similar. Under lower air pressure conditions (<10 ...

AI Technical Summary

Problems solved by technology

However, under high pressure conditions (>10 4 Pa), the electric field intensity required for gas excitation is high, and the ordinary reaction chamber needs to consume a lot of energy to form plasma due to the low formation efficiency of the microwave electric field, and the economy is poor

However, the microwave plasma torch method with relatively low energy consumption often obtains flame-like plasma under high pressure, which has a small volume and limited application range.

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