Microwave plasm reaction cavity

Abstract

The invention relates to a microwave plasma reaction chamber, which belongs to the field of microwave plasma excitation technology, comprising: a hollow cylindrical main chamber, a hollow cylindrical transition chamber, a gradient waveguide, a quartz glass sheet and a pull rod; the front end of the main chamber and the transition chamber The front end of the transition cavity is connected to the tapered waveguide, a quartz glass sheet is placed between the tapered waveguide and the transition cavity, and the pull rod is inserted into the main cavity from the rear end of the main cavity to adjust the length of the main cavity. The invention can obtain air plasma under high pressure and different frequency microwave input; the cavity has low energy consumption and high microwave conversion efficiency.

Description

technical field [0001] The invention belongs to the technical field of microwave plasma excitation, and particularly relates to high pressure (>10 4 Pa) Design of microwave plasma reaction chamber. Background technique [0002] Plasma has strong practical value in the fields of new materials, microelectronics and other industries and biological research, especially the way of using microwave to excite plasma. Compared with other plasma excitation methods, the existence space of plasma is large. The density of charged particles is high, and in high pressure environment (>10 4 Pa) is relatively uniform, and there is a lot of room for application expansion. [0003] At present, ordinary microwave plasma reaction chambers generally use single or mixed microwave modes to generate plasmoids inside different cavities. Due to different design structures, the generated plasmas have different shapes, but their properties are basically similar. Under low pressure conditions (&...

AI Technical Summary

Problems solved by technology

However, under high pressure conditions (>10 4 Pa), the electric field intensity required for gas excitation is high, and the ordinary reaction chamber needs to consume a lot of energy to form plasma due to the low formation efficiency of the microwave electric field, and the economy is poor

However, the microwave plasma torch method with relatively low energy consumption often obtains flame-like plasma under high pressure, which has a small volume and limited application range.

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