Fiber bundle and light-source equipment
A technology of optical fiber bundles and optical fibers, which is applied in the direction of bundled optical fibers, optics, and light guides, and can solve problems such as the limitation of the application range of optical fiber bundles, the degradation of optical fiber performance, and the collapse of the internal optical fiber core-cladding structure.
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no. 1 example
[0024] FIG. 1 is a schematic view showing a state in which a workpiece 55 as an irradiation target is irradiated with a light source device including an optical fiber bundle 10 according to a first embodiment of the present invention. The optical fiber bundle 10 constitutes a part of a light source device for manufacturing semiconductors: more specifically, the light source device collects output light from a plurality of laser diodes 52 and outputs high output light.
[0025] The optical fiber bundle 10 includes a plurality of unit optical fibers 11 and a metal sleeve 12 for bundling and bonding the insertion ends of the plurality of unit optical fibers 11 on the exit side. The light emitted from the laser diode 52 is incident on the unit optical fiber 11 through the lens 53 and the connector 51 provided for each unit optical fiber 11 . The light transmitted through each unit optical fiber 11 of the optical fiber bundle 10 is emitted from the output face 11A of each unit opti...
no. 2 example
[0038] FIG. 6 is a schematic view showing a state where an irradiation target 55 is irradiated with a light source device including an optical fiber bundle 20 according to a second embodiment of the present invention. FIG. 7 is a front view of the exit end face of the optical fiber bundle 20 . Like the first embodiment, the optical fiber bundle 20 constitutes a part of a light source device for manufacturing semiconductors.
[0039] The optical fiber bundle 20 includes a plurality of glass optical fibers 21 (second optical fibers), and further includes a plurality of unit optical fibers 11 (first optical fibers) and a metal sleeve 12 . The glass optical fiber 21 is made of the same glass as the unit optical fiber 11 and has better heat resistance than the adhesive 14 . The unit optical fiber 11 and the glass optical fiber 21 are substantially evenly arranged in the metal sleeve 12 , and are fixed on the sleeve 12 by curing the adhesive 14 throughout the entire length of the s...
no. 3 example
[0044] FIG. 9 is a front view of an exit end face of an optical fiber bundle 30 according to a third embodiment of the present invention. Like the first embodiment, the optical fiber bundle 30 constitutes a part of a light source device for manufacturing semiconductors. In the optical fiber bundle 30, the optical fiber is a metal-coated optical fiber 31 in which a metal coating constituting a filler is provided on the outer peripheral surface of the optical fiber. Different from the first embodiment, the space between the metal-coated optical fibers 31 in the sleeve 12 is filled with adhesive 14 over the entire length of the sleeve 12, so that the metal-coated optical fibers 31 and the sleeve 12 integrate.
[0045] FIG. 10 is a perspective view showing the metal-coated optical fiber 31 . The metal-coated optical fiber 31 coats the outer peripheral surface of the cladding 31A with a metal 32 such as aluminum, gold, silver, etc. that has high thermal conductivity and can be pl...
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