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Silicomethane conveying and processing system and method thereof

A treatment system, silane technology, applied in the pipeline system, mechanical equipment, gas/liquid distribution and storage, etc., can solve the problem of insignificant pipeline emptying treatment efficiency

Active Publication Date: 2010-06-23
IND TECH RES INST +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] In addition, as far as the pipeline evacuation treatment of the application burn box is concerned, it uniformly mixes the air introduced into the burn box with the silane gas, which often results in a low concentration of silane gas in the burn box The lower combustion limit of 1.33% will also lead to the problem of insignificant pipeline emptying treatment efficiency

Method used

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  • Silicomethane conveying and processing system and method thereof
  • Silicomethane conveying and processing system and method thereof
  • Silicomethane conveying and processing system and method thereof

Examples

Experimental program
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Embodiment 1

[0041] see figure 2 , The silane delivery and processing system 100 of the present embodiment mainly includes a silane storage container 110, a delivery pipeline 120, a combustion chamber 130, a bypass pipeline 140, a windmill 150, a pressure measuring device 160, a An adjustable damper 170 , a vacuum generator 180 , a first pneumatic valve 185 , a second pneumatic valve 190 and a third pneumatic valve 195 .

[0042] Silane gas is stored in the silane storage container 110 . The delivery pipeline 120 is connected to the silane storage container 110, which can deliver the silane gas to a semiconductor process tool M for specific semiconductor process.

[0043] The combustion chamber 130 has an inlet 131 and an outlet 132 , and the inlet 131 is opposite to the outlet 132 .

[0044] The bypass pipeline 140 is connected between the delivery pipeline 120 and the inlet 131 of the combustion chamber 130 , and is mainly used to deliver the silane gas in the delivery pipeline 120 to...

Embodiment 2

[0054] In this embodiment, the same components as in Embodiment 1 are marked with the same symbols.

[0055] see figure 2 and image 3 The difference between the silane delivery and processing system 100' of this embodiment and the silane delivery and treatment system 100 of Embodiment 1 lies in the difference in the installation position of the windmill 150. In more detail, as image 3 As shown, the windmill 150 of the silane delivery and processing system 100' is arranged on the inlet 131 of the combustion chamber 130, and the bypass pipeline 140 is also connected between the delivery pipeline 120 and the inlet 131 of the combustion chamber 130.

[0056] Similarly, the flow direction A' of the air drawn in by the windmill 150 from the inlet 131 of the combustion chamber 130 is also the same as the flow direction B' of the silane gas delivered to the combustion chamber 130 by the bypass pipeline 140 . That is to say, the air and the silane gas also enter the combustion ch...

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Abstract

The invention relates to a silicomethane delivering and processing system, comprising a silicomethane storage container, a delivery pipe, a combustion room, a bypass pipe and a windmill; wherein, the silicomethane storage container is stored with silicomethane gases; the delivery pipe is connected with the silicomethane storage container for delivering the silicomethane gases. The combustion roomis provided with an inlet and an outlet which face each other. The bypass pipe which is used to deliver the silicomethane gases in the delivery pipe to the combustion room is connected between the delivery pipe and the combustion room. The windmill which is used to suck air from the inlet of the combustion room into the combustion room is arranged on the outlet of the combustion room. The flowingdirection of air on the inlet of the combustion room is the same as that of the silicomethane gases delivered from the bypass pipe to the inlet of the combustion room.

Description

technical field [0001] The invention relates to a silane delivery and treatment system, in particular to a silane delivery and treatment system that can improve the efficiency of pipeline emptying treatment. Background technique [0002] In semiconductor manufacturing, silane (SiH 4 ) are very common. Generally speaking, the output application of silane can be done by silane delivery system. The silane delivery system usually mainly includes a silane storage container and a delivery pipeline, the delivery pipeline is connected to the silane storage container, which can be used to deliver the silane in the silane storage container to the semiconductor process equipment. On the other hand, when the silane storage container is to be replaced, the delivery pipeline must first be vented under low pressure. That is to say, the silane storage container can only be replaced after the silane gas in the delivery pipeline has been removed, so as to reduce the risk of replacing the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F17D1/02F17D3/03
Inventor 李崑池林瑞玉王世煌
Owner IND TECH RES INST