Substrate fixture and rotary disc for coating film and film coating machine

A substrate holder and turntable technology, which is applied in sputtering plating, ion implantation plating, vacuum evaporation plating and other directions, can solve the problems of wasting man-hours, wasting costs and the like

Inactive Publication Date: 2008-04-23
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this way, not only waste of man-hours (time for changing fixtures), but also waste of cost (dev

Method used

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  • Substrate fixture and rotary disc for coating film and film coating machine
  • Substrate fixture and rotary disc for coating film and film coating machine
  • Substrate fixture and rotary disc for coating film and film coating machine

Examples

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Embodiment Construction

[0017] Please also refer to figure 1 and figure 2 , the substrate holder 100 of the present invention includes a frame body 10, two clamping parts 20 that are arranged oppositely and are slidably installed in the frame body 10, and a plurality of elastic parts connecting the frame body 10 and the clamping parts 20. 30 pieces. The opposite surfaces of the two clamping parts 20 are provided with a clamping part 21 for clamping the substrate, and the elastic force of the plurality of elastic parts 30 acts on the two clamping parts 20 so that the two clamping parts 20 hold the substrates facing each other.

[0018] The frame body 10 is a square frame body, and its material can be wood, plastic or steel. The frame body 10 in this embodiment is made of steel. The clamping part 20 is a block matching the shape of the frame body 10, and its material is wood, plastic or steel. The clamping part 20 in this embodiment is made of steel. The clamping portion 21 is a groove defined in ...

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PUM

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Abstract

The substrate fixture for filming apparatus includes one frame, two holding units set oppositely and sliding in the frame, and elastic connecting units between the frame and each of the holding units. Two holding units have substrate holding parts in the opposite surfaces; and the elastic connecting units have elastic force acted onto the holding units for holding the substrate. When the fixture is in use, the substrate is held between the holding parts under the action of the elastic force. The substrate fixture is suitable for substrates of different sizes. The present invention has also a rotary disk and a filming machine provided with the substrate fixture.

Description

technical field [0001] The invention relates to coating technology, in particular to a substrate clamp for coating, a turntable for coating and a coating machine. Background technique [0002] At present, the surface of many industrial products is coated with functional films to improve various properties of the product surface. For example, an anti-reflection film is coated on the surface of the optical lens to reduce the reflectivity of the surface of the lens and reduce the energy loss of the incident light passing through the lens. Another example is that a layer of filter film is coated on the surface of some filter elements, which can filter out light of a certain predetermined band and make various filters. [0003] A coating machine generally includes a coating turntable, on which a clamp is arranged to hold the product to be coated. When coating, the turntable is rotated at high speed to reduce the difference in the number of atoms of the captured film material at...

Claims

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Application Information

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IPC IPC(8): C23C14/50C03C17/00
Inventor 凌维成
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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