Substrate fixture and rotary disc for coating film and film coating machine

Abstract

The substrate fixture for filming apparatus includes one frame, two holding units set oppositely and sliding in the frame, and elastic connecting units between the frame and each of the holding units. Two holding units have substrate holding parts in the opposite surfaces; and the elastic connecting units have elastic force acted onto the holding units for holding the substrate. When the fixture is in use, the substrate is held between the holding parts under the action of the elastic force. The substrate fixture is suitable for substrates of different sizes. The present invention has also a rotary disk and a filming machine provided with the substrate fixture.

Description

technical field [0001] The invention relates to coating technology, in particular to a substrate clamp for coating, a turntable for coating and a coating machine. Background technique [0002] At present, the surface of many industrial products is coated with functional films to improve various properties of the product surface. For example, an anti-reflection film is coated on the surface of the optical lens to reduce the reflectivity of the surface of the lens and reduce the energy loss of the incident light passing through the lens. Another example is that a layer of filter film is coated on the surface of some filter elements, which can filter out light of a certain predetermined band and make various filters. [0003] A coating machine generally includes a coating turntable, on which a clamp is arranged to hold the product to be coated. When coating, the turntable is rotated at high speed to reduce the difference in the number of atoms of the captured film material at...

AI Technical Summary

Problems solved by technology

In this way, not only waste of man-hours (time for changing fixtures), but also waste of cost (development of multiple fixtures to meet the clamping requirements of substrates of different shapes)

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