Microfluidic structures and how to make them
A microfluidic and source flow technology, applied in chemical instruments and methods, other household appliances, mixers, etc., can solve difficult problems and achieve low risk and low cost effects
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[0076] In FIG. 1 an upper substrate 1 can be seen in which interconnection channels 4 have been formed. A liner layer 2 with vias 5 provides selective connection to devices 6 in the lower substrate 3 .
[0077] In FIG. 2 a stack of substrates is schematically shown with a flow channel 7 connecting the interconnecting channels 4 of several stacked substrates.
[0078] A 3 / 4 partial perspective view of the final emulsifier of sample 3, made in 3 layers using 2 substrates, can be seen in FIG. 3 . The liner layer enables interconnect channels to pass through devices within the device layer, which allows for extremely high packing densities and arbitrary interconnect paths. By separating the interconnect layer from the device layer, it becomes easier to form structures of different scale sizes. Typically, the interconnect is much larger, for example ten times larger, than the device in order to minimize the pressure drop within the interconnect channels and ensure even distributi...
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