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Establishment method of control specification limit

A technology of specification limits and control standards, applied in the direction of total factory control, total factory control, electrical program control, etc.

Inactive Publication Date: 2008-05-07
POWERCHIP SEMICON CORP
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  • Abstract
  • Description
  • Claims
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  • Establishment method of control specification limit
  • Establishment method of control specification limit
  • Establishment method of control specification limit

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[0041] Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the ensuing description. It should be understood that the present invention can have various changes in different forms without departing from the scope of the present invention, and that the descriptions and illustrations therein are illustrative in nature and not intended to limit the present invention. .

[0042]Please refer to FIG. 1 , which discloses a method for formulating a control specification limit of a statistical process control (Statistical Process Control, SPC) according to a broader implementation form of a preferred embodiment of the present invention, wherein the control specification limit is used for semiconductor wafer production process control. As shown in the flow chart of Figure 1, the following steps are included: a) providing a mother group, as shown in step S11, wherein the mother group is a non-normal distribution (Non Norm...

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Abstract

The invention provides a definition method specification of a control specification limit in a statistical process control (Statistical Process Control, SPC), which comprises the following steps: step a, a sample group is provided; step b, k groups of bootstrap samples groups are chosen from the sample group in a bootstrap resampling way; step c, the average value and the relative standard deviation of the k groups of bootstrap sample groups are calculated from the k groups of bootstrap resampling sample groups; and step d, a control average value and a control standard deviation are calculated from the k groups of sample average value and relative standard deviation, wherein the control specification limit is the function of the control average value and the control standard deviation.

Description

technical field [0001] The invention relates to a method applied to statistical process control, in particular to a method for formulating control specification limits applied to statistical process control. Background technique [0002] Statistical Quality Control (SQC) is a technology to maintain and improve product quality, and Statistical Process Control (SPC) is one of the main tools, which focuses on the analysis of data in the manufacturing process , to determine the cause of product variation. Therefore, statistical quality management consists of two main parts, statistical process control and sampling acceptance criteria. Statistical process control (SPC) is the use of process operating variables to predictively monitor production variables or product quality variables. Therefore, the use of statistical process control can be said to start from detecting process abnormalities, accurately grasping the process status, avoiding abnormal occurrences, and the ultimate ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418G05B21/02G06Q10/00
CPCY02P90/02
Inventor 吕建辉林正淇张惟富
Owner POWERCHIP SEMICON CORP
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