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Method and system for monitoring semiconductor production line

A technology for monitoring systems and semiconductors, which is applied in general control systems, control/regulation systems, semiconductor/solid-state device manufacturing, etc., and can solve problems such as the inability to monitor the state information of semiconductor equipment at the same time

Inactive Publication Date: 2008-06-11
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Therefore, the object of the present invention is to provide a monitoring method and system for a semiconductor production line to solve the problem that the existing production monitoring method and system cannot simultaneously monitor the state information of each semiconductor device in the entire production line

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  • Method and system for monitoring semiconductor production line
  • Method and system for monitoring semiconductor production line
  • Method and system for monitoring semiconductor production line

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Embodiment Construction

[0031] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0032] image 3 It is a flow chart of the monitoring method of the semiconductor production line. like image 3 As shown, firstly, the status information of each semiconductor device in the production line is acquired (S300); there is a control computer in each semiconductor device of the production line, and the control computer transmits the status information of each component unit in the semiconductor device to the manufacturing execution system, through The Manufacturing Execution System creates a database of equipment status information on semiconductor equipment on the server.

[0033] Generate an information identifier corresponding to the state information of each semiconductor device in the production line, and establish a ...

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Abstract

A monitoring method on a semiconductor production line is provided, which comprises: obtaining state information of each semiconductor equipment on the production line; establishing an interlinkage between the state information of the each semiconductor equipment and the related information marking; obtaining the state information of the each semiconductor equipment through recognizing the information marking; the invention also provides a monitoring system on a semiconductor production line, which comprises: a data obtaining device for obtaining state information of each semiconductor equipment on the production line; a data processing device for generating information marking of the state information of the semiconductor equipment on the production line and establishing an interlinkage between the state information and the related information marking. The monitoring method and system on the production line in the invention can monitor the state information problem of each equipment on the whole production line.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method and system for monitoring a production line in semiconductor manufacturing. Background technique [0002] The manufacturing process of semiconductor devices involves hundreds of processes and multiple equipment, especially as semiconductor manufacturing develops towards high integration, the manufacturing process adopts highly integrated assembly line operations and relies more on highly automated equipment . In the production process, it is necessary to make full use of the resources in the manufacturing plant through efficient and orderly production scheduling to improve efficiency and reduce costs. The Chinese patent No. 200510026662.7 discloses a dynamic scheduling method of a production line, through which dynamic real-time production scheduling can be realized, and various resources in production can be utilized to the greatest extent to reduce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/04G05B19/048H01L21/00
Inventor 伊德尔洪启德陈泰祥
Owner SEMICON MFG INT (SHANGHAI) CORP
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