Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope

Abstract

A charge relaxation rotary micro-gyroscope with cylindrical and multi-ring-shaped axial magnetizing, permanent magnetic and diamagnetic rotors belongs to the field of the micro-electromechanical system and comprises an upper stator, rotors and a lower stator. The invention can realize uncontrolled self-supporting suspension by providing suspension force and lateral stabilizing force to diamagnetic rotors by the cylindrical and multi-ring-shaped axial magnetizing and permanent magnet in the upper and the lower stators, and can realize constant high-speed rotation of the rotors by charge relaxation without rotation speed detection. At the same time, the axial detection of the upper and the lower stators, the lateral detection of a feedback electrode and the lower stator and the electrostatic force between the feedback electrode and the rotors can be used for improving the axial rigidity, the lateral rigidity and the shock resistance of the micro-gyroscope, improving stable suspension performance, and reducing supporting and supporting control difficulties of the rotors, so as to realize self-stabilization without complex control mechanisms. The invention has the advantages of low power consumption consumption, convenient implementation and small size; and can be used for measuring the acceleration of three axes along X-axis, Y-axis and Z-axis and the two axial angle accelerationaround the X-axis and the Y-axis at the same time.

Description

Technical field [0001] The present invention involves a micro gyroscope in the field of microcomputer and electrical technology, which is specifically a cylindrical and polygon axial axial metomicallychard magnetic anti -magnetic rotor rotation micro gyro. Background technique [0002] The inertial navigation system is an autonomous navigation technology that directly calculates the location of the carrier, the direction, and the posture of navigation parameters according to the Newton inertia law.During the work process, it is neither to emit energy from the outside world nor obtaining information from the outside. It has unique advantages such as non -disturbing, can be used anywhere, good dynamic performance, and rich navigation output information.With a wide range of applications, the emergence of MEMS (Micro-ElectromeChanical Systems, micro-electromechanical system) technology has led to the development of inertial navigation systems in the direction of low cost, miniaturiz...

AI Technical Summary

Problems solved by technology

This technology has the following shortcomings. The suspension support of the rotor needs to control 5 degrees of freedom, which greatly increases the requirements for the suspension support of the rotor. Since the rotor is rotated at a high speed by using a variable capacitor, there must be separate electrodes or equivalent electrodes on the stator and rotor. land area, complex structure

Images