Thin film material micro- stretching test system

A testing system and thin-film material technology, applied in the direction of analyzing materials, measuring devices, instruments, etc., can solve problems such as inappropriate measurement of deformation, plastic deformation of rigid beams, and high rigidity of support beams, achieving low cost, overcoming experimental errors, The effect of easy operation

Inactive Publication Date: 2008-08-13
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

The advantage of this method is that it can be uniaxially stretched, the relationship between stress and strain can be directly measured, and it can measure a variety of materials and multi-layer composite films; its disadvantage is that it is not suitable for measuring large deformation due to the large rigidity of the support beam. For large materials, rigid beams are prone to plastic deformation during stretching, causing errors
Moreover, its sample preparation is more complicated and difficult to operate.

Method used

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  • Thin film material micro- stretching test system
  • Thin film material micro- stretching test system
  • Thin film material micro- stretching test system

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Embodiment Construction

[0028] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.

[0029] The whole system includes sample stage, sample structure, driving mechanism and measurement observation device. The sample structure is fixed on the sample stage, the right end is connected with the driving mechanism, and a part of the measurement and observation device is placed above the sample structure.

[0030] As shown in accompanying drawing 3 and accompanying drawing 4, sample stage comprises metal base 7, XYZθ mobile platform 8 and vacuum adsorption platform 9, and XYZθ mobile platform 8 is fixed on the anti-vibration platform, and vacuum adsorption pl...

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Abstract

The invention relates to a film material micro-extending test system in the filed of film material technique, comprising a sample table, a sample structure, a drive mechanism, and a measuring observing device. A metal base in the sample table is absorbed in a vacuum absorbing table, and then fixed to a XYZ theta mobile platform via rivet; the mobile table in the sampling structure is connected with a support frame via a support spring; one end of the film sample is connected with the mobile platform, and another end is fixed to the support frame; a marker post is located at one end of the mobile platform close to the film sample; one end of the stretching bar in the drive mechanism, and another end is fixed to the XYZ mobile platform; an electromagnetic drive motor is connected with the XYZ mobile platform. The element preparation technique of the invention is easy, and convenient to operate. The invention has low cost and good linearity. The invention overcomes experimental error caused by plastic deformation of the support beam in the stretching process.

Description

technical field [0001] The invention relates to a testing system in the technical field of thin film materials, more specifically, to a micro-tensile testing system for thin film materials. Background technique [0002] With the rapid development of micro-electromechanical systems (MEMS), various thin-film materials are widely used in various micro-devices. The mechanical properties of these thin film materials are very important to the reliability design of MEMS devices. At the micron / nano scale, due to the influence of surface effects, structure and processing, the mechanical properties of materials are very different from those of bulk materials. Therefore, it is very important to test the mechanical properties of micron-scale thin film materials. Uniaxial tensile test is the most direct method to measure parameters such as material elastic modulus, Poisson's ratio, yield strength and breaking strength. However, due to the small size of film samples, traditional uniaxial...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/00
Inventor 丁桂甫刘瑞李雪萍汪红杨春生
Owner SHANGHAI JIAO TONG UNIV
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