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Electronic device testing device and its temperature control method

An electronic device and testing device technology, applied in the field of electronic device devices, can solve problems such as difficulty in correctly controlling the temperature of an IC device to be tested, etc.

Inactive Publication Date: 2008-08-20
ADVANTEST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the temperature of the IC device to be tested measured by the thermal diode may not be correct in most cases. If the measured temperature is used intact, it is difficult to correctly control the temperature of the IC device to be tested.

Method used

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  • Electronic device testing device and its temperature control method
  • Electronic device testing device and its temperature control method
  • Electronic device testing device and its temperature control method

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Embodiment Construction

[0026] Embodiments of the present invention will be described below with reference to the accompanying drawings.

[0027] As shown in FIG. 1 and FIG. 2 , the electronic device testing device 1 has an electronic device handling device (hereinafter referred to as a carrier) 10 , a test head 20 and a test host 30 , and the test head 20 and the test host 30 are electrically connected through a cable 40 .

[0028] The carrier 10 is provided with a base plate 109 on which are provided an empty tray 101 , a supply tray 102 , a sorting tray 103 , two X-Y transfer devices 104 and 105 , a heating plate 106 and two buffers 108 . Furthermore, an opening 110 is formed in the substrate 109 , and the IC device D is mounted on the contact portion 201 of the test head 20 provided on the back side of the carrier 10 through the opening 110 of the substrate 109 as shown in FIG. 2 .

[0029] The electronic device testing apparatus 1 is constituted as follows: while IC devices (an example of electr...

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Abstract

An electronic device testing apparatus is described that includes a temperature measurement device for measuring a temperature of an IC device based on a voltage of a thermal diode provided inside the IC device, a temperature sensor and a temperature applying device provided to a pusher, and a temperature control portion for calculating a correction value from a difference of a measurement temperature of a predetermined IC device by the temperature measurement device and that by the temperature sensor. A temperature of the IC device to be tested is measured by the temperature measurement device at an actual operation, and the temperature applying device is controlled based on the obtained measurement temperature and the correction value calculated by the temperature control portion.

Description

technical field [0001] The present invention relates to a device for testing electronic devices such as IC devices, that is, an electronic device testing device capable of controlling the temperature of the electronic device, and also relates to a temperature control method for the electronic device testing device. Background technique [0002] In the manufacturing process of electronic devices such as IC devices, an electronic device testing device for testing the final electronic device is required. [0003] IC device testing using an electronic device testing apparatus is performed, for example, as follows. The IC device to be tested is sent over the test head with the socket installed, and then the IC device to be tested is pressed down to be installed in the socket, so that the connecting terminals of the socket contact the external terminals of the IC device to be tested. As a result, the IC device to be tested is electrically connected to the main body of the test de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26H01L21/66
CPCG01R31/2891G01R1/0458G01R31/26H01L22/00
Inventor 细田滋小川正章
Owner ADVANTEST CORP
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