Control system for micro-nano sample in electronic microscope

Abstract

The present invention discloses a control system for micro-nano samples under electron microscopes, comprising an operation platform, a sample carrier, operation modules and a control device. The control system is characterized in that: the control device comprises a signal transmitting device, a signal receiving device and a battery component compatible with vacuum environment; the signal receiving device is arranged on the operation platform; the signal transmitting device is connected with a human-computer exchange controller and transmits control signals to the signal receiving device through wireless transmission medium; the battery component supplies power to the receiving device and a control circuit; the receiving device receives signals and drives the operation modules to executecorresponding operation via the control circuit. Through the fit of the signal transmitting device and the receiving device, the present invention uses the wireless transmission medium as a communication mode, so as to realize the wireless control on the operation modules in a sample chamber and prevent conductor interpenetration and sample chamber refitting from affecting the vacuum degree of the sample chamber. The control system is suitable for various electron microscopes, and is direct and convenient to operate.

Description

technical field [0001] The invention relates to a control system for observing and processing micro-nano samples, in particular to a control system for manipulating micro-nano samples to perform various operations under an electron microscope. Background technique [0002] An electron microscope is an instrument that uses electron beams and electron lenses instead of light beams and optical lenses to image the fine structures of substances at very high magnifications based on the principle of electron optics. Indicated by the minimum spacing. The maximum magnification of a modern electron microscope exceeds 3 million times, while the maximum magnification of an optical microscope is about 2000 times (this is limited by the wavelength of light on which the microscope performs its work), so certain things can be directly observed through an electron microscope. Atoms of heavy metals and neatly arranged atomic lattices in crystals. [0003] Modern electron microscopes general...

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Problems solved by technology

[0007] At present, the input and output commands of the control system are connected to the control circuit on the operating platform through the wires passing through the sample room, and holes are reserved on the side wall of the sample room for connection. The resulting problems are: ① test The sample chamber needs to maintain a vacuum state (10 -7 torr), a sealing device that can ensure the vacuum degree of the sample chamber needs to be installed in the channel where the wires pass through, and when there are more operating modules, there will be more input and output wires corresponding to each module, which will affect the production of the sealing device. Considerable difficulties, and the vacuum degree in the sample chamber is one of the key factors affecting the imaging quality of the microscope; ②The position and number of holes reserved on the side wall of the sample chamber on different types of electron microscopes are inconsistent. When the control system and the microscope During assembly, it is necessary to refit the sample room, reconnect the control circuits, and maintain the consistency of the test environment in the sample room, thus increasing the trouble of repeated testing and personalized modification; ③The space in the sample room is limited, and the size is as follows: 15cm×15cm×6cm, in such a limited space, it is necessary to set up a control system (including various operating modules, sample stages, etc.), and the space for the control circuit and input and output command lines to be connected is limited, so the sample executes each The number of instruction line access and setting operation modules required for such complex operations is limited, and the ability of automatic operation is reduced, which brings inconvenience to research and measurement work

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