Planarity detection device and method

Abstract

The invention discloses a flatness detection device, which includes a light emission unit, a light receive unit, an object stage, a shading unit and a process unit. The light receive unit is relate to the light emission unit. The object stage is between the light emission unit and the light receive unit and is used for loading a test work-piece. The shading unit is located between the light emission unit and the light receive unit, which is used for forming a light gap coordinate with a test surface between a vertex and a lowest point of the test surface of the test work-piece when detected. The process unit is connected to the light receive unit, which is used for processing light information received by the light receive unit. The invention also discloses a flatness detection method. The flatness detection device has the advantages of high accuracy and avoiding bumping with the test work-piece.

Description

technical field [0001] The invention relates to a detection device, in particular to a flatness detection device using the photoelectric principle, and also to a flatness detection method. Background technique [0002] In mechanical processing, it is often necessary to inspect the flatness of the surface of the processed workpiece to verify whether the shape of the product is qualified. In the traditional flatness detection method, the method of adding a feeler gauge to the platform is more commonly used. [0003] The process of flatness detection by means of platform plus feeler gauge is as follows: first, place the workpiece on a reference platform; then use feeler gauge to check whether the flatness value of the workpiece is qualified. The method of adding a feeler gauge to the platform has the advantages of simple working principle and low equipment cost. [0004] However, the flatness of the workpiece is detected by using the platform plus a feeler gauge, and the dete...

AI Technical Summary

Problems solved by technology

In this way, the detection accuracy of the platform and the feeler gauge will inevitably decrease after long-term use; and, the collision and friction between the surface to be tested of the workpiece and the platform and the feeler gauge during detection may also leave scratches on the surface of the workpiece to be tested, As a result, the surface quality of the workpiece is affected. If the workpiece has high requirements on the surface quality, this measurement method cannot meet the measurement requirements.

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