Process- manufacturing method for improving ink-jet printing output dose rate on colorful spectral filter as well as apparatus thereof

Abstract

The present invention provides a thin atmospheric pressure plasma device, and a control method improving the output quantity rate of the ink-jet printing on the color filter, the plasma device changes the surface physical properties of a black matrix, used with a solid mask together in the production course of the ink-jet printing, the production efficiency loss of the color filter piece manufacture is greatly improved.

Description

technical field [0001] The invention relates to a thin-layer atmospheric pressure plasma device and a process method for improving the output rate of ink-jet printing on a color filter. The plasmonic device will change the physical properties of the black matrix (blackmatrix) surface. Used together with a solid mask during inkjet printing production, the production yield loss in color filter manufacturing can be greatly reduced. Background technique [0002] Traditionally, color filters in flat panel displays are fabricated using colorpigment dispensing or electroplating methods. Due to the waste of expensive pigment materials and the multi-mask process required to produce RGB, the demand for using inkjet printing technology as a mass production tool to produce color filters has increased dramatically. This inkjet printing process not only saves costs but also simplifies production steps. Also, the costly capex and opex of using a photomask process may be saved. [0003]...

AI Technical Summary

Problems solved by technology

[0010] As discussed in the above article, the common disadvantage of such devices is the use of helium-containing gas as the working gas to prevent plasma filamentation, sparking, and gas thermalization

Gases containing helium allow the device to generate diffuse atmospheric-pressure cryogenic plasmas, but using a lot of helium, in addition to being expensive, limits the operating range of the device using other reactive gases

In addition, in order to further prevent the operating gas from heating and sparking, the plasma must be generated in a large amount of flowing working gas, which makes the operation of the plasma device must increase energy and consume a large amount of gas

Another disadvantage of using jet plasma equipment is that the plasma occurs at a distance greater than 1 mm above the surface being treated

This, together with the high flow of working gas addition, results in recombination of the active ionized fraction of the plasma before it comes into contact with the surface being treated, making such devices extremely energy inefficient

Furthermore, U.S. Patent Application No. 20050045103 further shows that the discharge plasma generated by these devices is directly in contact with the metal electrode surface and causes electrode surface erosion

A further disadvantage of using such equipment for manufacturing is that such plasmas are generally not safe for the human body

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