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Three-dimensional revolving gear of workpieces of vacuum film coating equipment

A vacuum coating and three-dimensional rotation technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of non-coating, uneven coating, uneven peripheral coating, etc., and improve the coating quality And the effect of production efficiency and wide adaptability

Active Publication Date: 2011-08-24
兰州大成科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Vacuum coating technology is currently one of the ways to prepare films with various properties. The workpiece turret of conventional vacuum coating equipment only has the function of revolution, revolution + rotation. Therefore, there are uneven coatings on the periphery, and local exposed surfaces cannot be coated or coated. Uneven, the surrounding outer body cannot be vacuum coated in one clamping

Method used

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  • Three-dimensional revolving gear of workpieces of vacuum film coating equipment
  • Three-dimensional revolving gear of workpieces of vacuum film coating equipment
  • Three-dimensional revolving gear of workpieces of vacuum film coating equipment

Examples

Experimental program
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Effect test

Embodiment 1

[0023] Example 1, see figure 1 , figure 2 , a vacuum coating equipment workpiece three-dimensional rotation mechanism, including a power input shaft 1-1, a revolution disc support seat 1-2, a revolution rotation bearing 1-3, a revolution disc rotation connection disc 1-4, a revolution disc 1-5, On the revolving disk 1-5, a workpiece turntable support rod 13 is provided, and an upper bracket 14 is arranged above the workpiece turntable support rod 13. A workpiece rotation shaft 11 is provided, and the workpiece rotation shaft 11 is arranged on the workpiece rotation rotary connector 8, and a rotation joint 10 is provided between the workpiece rod 4 and the workpiece rotation rotation connector 8, and the workpiece rotation shaft 11 passes through the rotation transmission chain 12 Connected with each other, a workpiece rotation and workpiece rotation mechanism are provided on the revolving disk 1-5. The revolving disk 1-5 is fixedly connected with the bearing seat 7, and a b...

Embodiment 2

[0024] Example 2, see figure 1 , image 3 , a vacuum coating equipment workpiece three-dimensional rotation mechanism, including a power input shaft 1-1, a revolution disc support seat 1-2, a revolution rotation bearing 1-3, a revolution disc rotation connection disc 1-4, a revolution disc 1-5, On the revolving disk 1-5, a workpiece turntable support rod 13 is provided, and an upper bracket 14 is arranged above the workpiece turntable support rod 13. A workpiece rotation shaft 11 is provided, and the workpiece rotation shaft 11 is arranged on the workpiece rotation rotary connector 8, and a rotation joint 10 is provided between the workpiece rod 4 and the workpiece rotation rotation connector 8, and the workpiece rotation shaft 11 passes through the rotation transmission chain 12 Connected with each other, a workpiece rotation and workpiece rotation mechanism are provided on the revolving disk 1-5. The revolution disk 1-5 is fixedly connected with the bearing seat 7, and the...

Embodiment 3

[0025] Example 3, see figure 1 , Figure 4 , a vacuum coating equipment workpiece three-dimensional rotation mechanism, including a power input shaft 1-1, a revolution disc support seat 1-2, a revolution rotation bearing 1-3, a revolution disc rotation connection disc 1-4, a revolution disc 1-5, On the revolving disk 1-5, a workpiece turntable support rod 13 is provided, and an upper bracket 14 is arranged above the workpiece turntable support rod 13. A workpiece rotation shaft 11 is provided, and the workpiece rotation shaft 11 is arranged on the workpiece rotation rotary connector 8, and a rotation connector 10 is provided between the workpiece rod 4 and the workpiece rotation rotation connector 8, and the workpiece rotation rotation connector 8 and the rotation restriction limit The position bar 9 is fixedly connected, and the rotation restraint limit bar 9 is fixedly connected on the revolution disk 1-5. In this state, the autorotation rotary connector 8 is constrained a...

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Abstract

The invention relates to a three-dimensional rotation mechanism of a vacuum coating equipment workpiece, which comprises a power input shaft (1-1), a supporting pedestal of a revolution table (1-2), a revolution rotary bearing (1-3), a rotary connecting table (1-4) of a revolution table, the revolution table (1-5); wherein, the revolution table (1-5) is provided with a support bar (13) of a workpiece turntable, an upper bracket (14) is arranged above the support bar (13) of the workpiece turntable; a workpiece bar (4) is connected with the upper bracket (14) by a rotary supporting pedestal (15); the workpiece bar (4) is provided with a workpiece rotation axis (11). The mechanism is characterized in that the revolution table (1-5) is provided with a workpiece rotation and workpiece revolving mechanism, and the rotary connecting table (1-4) of the revolution table is fixedly connected with a rotation gear table (2-2). The mechanism can realize four different moving effects of the workpiece, i.e. revolution, revolution and revolving, revolution and rotation, revolution and rotation and revolving in the vacuum environment, has the advantages of flexibility and diversity as well as improves coating quality and productivity effect.

Description

Technical field: [0001] The invention mainly relates to vacuum coating equipment, in particular to the structure of a coating workpiece turret. Background technique: [0002] Vacuum coating technology is currently one of the ways to prepare thin films with various properties. The workpiece turret of conventional vacuum coating equipment only has the function of revolution, revolution + rotation. Therefore, there are uneven coatings on the periphery, and local exposed surfaces cannot be coated or coated. Uneven, the surrounding outer body cannot be vacuum coated in one clamping. Invention content: [0003] The purpose of the present invention is to avoid the deficiencies of the prior art and provide a three-dimensional rotation mechanism for workpieces of vacuum coating equipment, which can realize four types of rotation, revolution+rotation, revolution+rotation, revolution+autorotation+rotation of workpieces in a vacuum environment. Motion effects in different states, wit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
Inventor 范多旺范多进杨树本牛晓山武福孔令刚王成龙
Owner 兰州大成科技股份有限公司