Device for measuring temperature of electrostatic chuck

A technology of electrostatic chuck and temperature measuring device, which is applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., can solve problems such as poor contact and damage, and achieve the effect of low technical requirements for processing and installation

Active Publication Date: 2011-01-12
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The technical requirements for the processing and installation of the electrostatic chuck 1 and the temperature sensor 4 are relatively high, which may easily lead to poor contact between the upper surface of the temperature sensor 4 and the electrostatic chuck 1, or damage the ceramic layer of the electrostatic chuck 1 that is in contact with the temperature sensor 4

Method used

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  • Device for measuring temperature of electrostatic chuck
  • Device for measuring temperature of electrostatic chuck
  • Device for measuring temperature of electrostatic chuck

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Embodiment Construction

[0019] The temperature measuring device of the electrostatic chuck of the present invention, its preferred embodiment is as follows image 3 As shown, the temperature measurement device is installed on the electrostatic chuck 1, and the electrostatic chuck 1 is installed on the base 2, and communicates with the temperature display and control device through the photoelectric induction probe 3 and optical fiber 5, so as to achieve real-time and precise temperature control the goal of.

[0020] Specifically, an installation hole may be provided at the bottom of the electrostatic chuck 1, and the temperature measuring device may be installed in the installation hole.

[0021] like Figure 4 , Figure 5 As shown, the temperature measuring device includes a temperature sensor 6 and a fixed module 8, and a spring 7 or other elastic elements, such as rubber, are arranged between the temperature sensor 6 and the fixed module 8 .

[0022] see you again image 3 , the temperature se...

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Abstract

The invention discloses a temperature measurement device of an electrostatic chuck; the temperature measurement device is arranged in a mounting hole at the lower part of the electrostatic chuck and comprises a temperature sensor and a fixed module; the temperature sensor is movably arranged in the mounting hole; the fixed module is fixed at the mouth part of the mounting hole through screw thread; and a spring is arranged between the temperature sensor and the fixed module. The lower part of the T-shaped temperature sensor is inserted into a hole at the middle part of the fixed module. The spring stays in a pre-compression state, and the pressure of the spring enables the upper surface of the temperature sensor to be well contacted with the electrostatic chuck; besides, the temperature measurement device has low technical requirements on the processing and assembly of the electrostatic chuck and the temperature sensor and can not damage the electrostatic chuck.

Description

technical field [0001] The invention relates to semiconductor processing equipment, in particular to a temperature measuring device for an electrostatic chuck in the semiconductor processing equipment. Background technique [0002] In semiconductor processing equipment (such as etching machines), the use of electrostatic chucks to hold substrates has become more and more widely used. Accurate and repeatable measurement and control of electrostatic chuck temperature is increasingly important. [0003] Chucks are used in semiconductor process equipment to fix and support substrates to prevent substrates from moving or misaligning during the process. The temperature of the substrate is very important for the semiconductor process, and the temperature control of the substrate is realized by controlling the temperature of the electrostatic chuck. Therefore, accurate and repeatable measurement and control of the electrostatic chuck temperature is very important. [0004] like ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/00H01L21/683
Inventor 张俊
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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