Device for measuring temperature of electrostatic chuck
A technology of electrostatic chuck and temperature measuring device, which is applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., can solve problems such as poor contact and damage, and achieve the effect of low technical requirements for processing and installation
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0019] The temperature measuring device of the electrostatic chuck of the present invention, its preferred embodiment is as follows image 3 As shown, the temperature measurement device is installed on the electrostatic chuck 1, and the electrostatic chuck 1 is installed on the base 2, and communicates with the temperature display and control device through the photoelectric induction probe 3 and optical fiber 5, so as to achieve real-time and precise temperature control the goal of.
[0020] Specifically, an installation hole may be provided at the bottom of the electrostatic chuck 1, and the temperature measuring device may be installed in the installation hole.
[0021] like Figure 4 , Figure 5 As shown, the temperature measuring device includes a temperature sensor 6 and a fixed module 8, and a spring 7 or other elastic elements, such as rubber, are arranged between the temperature sensor 6 and the fixed module 8 .
[0022] see you again image 3 , the temperature se...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com