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Current-based method and apparatus for detecting and classifying arcs

A kind of equipment and current technology, applied in the field of detection and classification of arcing, can solve the problems of ambiguity, voltage and current drop, loss of information, etc.

Active Publication Date: 2009-07-01
SCHNEIDER ELECTRIC USA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0018] In addition to the issues discussed, when counting arcing only as a voltage threshold violation, some information may be missing or ambiguous if the power supply reacts to the arcing with reduced delivered power
The result of reducing power is a drop in both voltage and current

Method used

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  • Current-based method and apparatus for detecting and classifying arcs
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  • Current-based method and apparatus for detecting and classifying arcs

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Embodiment Construction

[0083] While the invention is capable of embodiments in many different forms, there are shown in the drawings and will now be described in detail preferred embodiments of the invention, it being understood that the disclosure is to be considered as illustrative of the principles of the invention and not as an illustration of the principles of the invention. The invention in its broadest sense is limited to the illustrated embodiments.

[0084] The present invention is believed to be applicable to different plasma generating equipment types, and finds particular application in film deposition applications which benefit from the technique of responding to arcing detected during the generation of a plasma environment. The example embodiments described herein incorporate PVD sputtering techniques; however, the invention can be practiced with various systems, including those using plasma generation techniques such as plasma etching or plasma enhanced chemical vapor deposition system...

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Abstract

An apparatus and technique are provided for generating a plasma using a power supply circuit and arc detection arrangement. The power supply circuit has a cathode enclosed in a chamber, and is adapted to generate a power-related parameter. The arc detection arrangement is communicatively coupled to the power supply circuit and adapted to assess the severity of arcing in the chamber by comparing the power-related parameter to at least one threshold. According to various implementations, arc occurrences, arcing duration, intensity and / or energy are measured responsive to comparing the power-related parameter to the at least one threshold. According to further implementations, the above-mentioned measured quantities are accumulated and / or further processed. An apparatus and method are also provided for detecting arc events when the current spikes above a threshold level. The method and apparatus is also for classifying the arc events based on the voltage and current signals and the duration each is beyond a threshold value.

Description

[0001] Cross References to Related Applications [0002] This application is a continuation-in-part of U.S. Patent Application No. 10 / 769,023, filed January 30, 2004, which is a continuation-in-part of U.S. Patent Application No. 10 / 121,445, filed April 12, 2002 Go ahead and apply. This application also claims the benefit of priority to US Provisional Patent Application No. 60 / 783,346, filed March 17, 2006, for "Current-Based Method and Apparatus for Detecting and Classifying Arcing." technical field [0003] The present invention relates generally to methods and apparatus for detecting and classifying arcing in equipment, and more particularly to detecting and classifying arcing during physical vapor deposition by sensing current and voltage and timing the duration each exceeds one or more thresholds. Arc method and apparatus. Background technique [0004] Sputter deposition, such as physical vapor deposition (PVD), is a process used to deposit thin, highly uniform layers...

Claims

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Application Information

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IPC IPC(8): H01J37/32H01J37/34
CPCH01J37/3402H01J2237/0206H01J37/3444H01J37/32935
Inventor 艾伦·F·克劳斯雷蒙德·W·哈里斯保罗·R·布达
Owner SCHNEIDER ELECTRIC USA INC
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