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Current-based method and apparatus for detecting and classifying arcing

A device, a technology for current spikes, used in the detection and classification of arcs, to solve problems such as missing information, ambiguity, voltage and current drops, etc.

Active Publication Date: 2012-02-08
SCHNEIDER ELECTRIC USA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0018] In addition to the issues discussed, when counting arcing only as a voltage threshold violation, some information may be missing or ambiguous if the power supply reacts to the arcing with reduced delivered power
The result of reducing power is a drop in both voltage and current

Method used

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  • Current-based method and apparatus for detecting and classifying arcing
  • Current-based method and apparatus for detecting and classifying arcing
  • Current-based method and apparatus for detecting and classifying arcing

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Embodiment Construction

[0085] While the invention is capable of embodiments in many different forms, there are shown in the drawings and will now be described in detail preferred embodiments of the invention, it being understood that the disclosure is to be considered as illustrative of the principles of the invention and not as an illustration of the principles of the invention. The invention in its broadest sense is limited to the illustrated embodiments.

[0086] The present invention is believed to be applicable to different plasma generating equipment types, and finds particular application in film deposition applications which benefit from the technique of responding to arcing detected during the generation of a plasma environment. The example embodiments described herein incorporate PVD sputtering techniques; however, the invention can be practiced with various systems, including those using plasma generation techniques such as plasma etching or plasma enhanced chemical vapor deposition systems ...

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Abstract

An apparatus and technique for generating plasma using a power supply circuit and an arc detection device are provided. A power circuit has a cathode enclosed in a chamber and is adapted to generate power related parameters. The arc detection arrangement is communicatively coupled to the power supply circuit and adapted to estimate the severity of arcing in the chamber by comparing the power related parameter to less than a threshold value. According to various implementations, arc occurrence, arc duration, severity, and / or energy are measured in response to a comparison of the power-related parameter to less than a threshold value. According to another implementation, the above-mentioned measured quantities are accumulated and / or further processed. Apparatus and methods for detecting arcing when a current spike is above a threshold level are also provided. The method and apparatus are also used to classify arcing events based on the voltage and current signals and the duration that each signal exceeds a threshold.

Description

[0001] Cross References to Related Applications [0002] This application is a continuation-in-part of U.S. Patent Application No. 10 / 769,023, filed January 30, 2004, which is a continuation-in-part of U.S. Patent Application No. 10 / 121,445, filed April 12, 2002 Go ahead and apply. This application also claims the benefit of priority to US Provisional Patent Application No. 60 / 783,346, filed March 17, 2006, for "Current-Based Method and Apparatus for Detecting and Classifying Arcing." technical field [0003] The present invention relates generally to methods and apparatus for detecting and classifying arcing in equipment, and more particularly to detecting and classifying arcing during physical vapor deposition by sensing current and voltage and timing the duration each exceeds one or more thresholds. Arc method and apparatus. Background technique [0004] Sputter deposition, such as physical vapor deposition (PVD), is a process used to deposit thin, highly uniform layers...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/32H01J37/34
CPCH01J37/3402H01J2237/0206H01J37/3444H01J37/32935
Inventor 艾伦·F·克劳斯雷蒙德·W·哈里斯保罗·R·布达
Owner SCHNEIDER ELECTRIC USA INC
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