Micro laser beam precise finishing optical device

Abstract

The invention discloses a micro-laser beam precision machining optical device, and relates to a precision machining device. The invention provides the micro-laser beam precision machining optical device for laser precision machining, which is provided with visible light coaxial positioning indication and can conveniently realize direct coupling of diffraction-free beams and nozzle micropores. Themicro-laser beam precision machining optical device is provided with a laser, a visible light source, a flat mirror, a beam expanding collimator, an axicon, an optical window, a pressure fluid chamber and nozzle micropores, wherein the flat mirror is positioned in front of the laser and the visible light source; laser beams emitted by the laser are coupled with beams of the visible light source through the flat mirror; the beam expanding collimator is positioned in front of the flat mirror; the axicon is positioned in front of the beam expanding collimator; the pressure fluid chamber is positioned in front of the axicon; the optical window is arranged on the top of the pressure fluid chamber; the bottom of the pressure fluid chamber is provided with the nozzle micropores; and the beams coupled through the flat mirror are coaxial with the beam expanding collimator, the axicon, the optical window and the nozzle micropores.

Description

technical field [0001] The invention relates to a precision processing device, in particular to a micro-laser beam precision processing optical device using water-guided laser technology. Background technique [0002] Richerzhagen Bernold of the Swiss Federal University of Technology studied the phenomenon of light transmission in water beams, and developed it into a microfabrication technology, which became an international patent technology (WO 95 / 32834). figure 1 As shown, the low pressure is used to generate the fine water jet beam 16, and the laser beam 11 is focused on the outlet of the nozzle microhole 15 with the traditional positive lens 12, and the laser beam is guided by the total reflection of the laser beam on the contact surface of water and air. The beam acts on the workpiece to be processed, and its effect is similar to the traditional glass optical fiber method. This technology can solve the problems of small effective processing thickness of the workpiece ...

AI Technical Summary

Problems solved by technology

This technology can solve the problems of small effective processing thickness of the workpiece in traditional laser processing, and the taper and roughness of the processing surface. The guiding laser system has the disadvantages of no visible light coaxial positioning indication, difficult system assembly and adjustment, inaccurate processing positioning, and inability to realize random detection, etc.

Images