Methods of patterning a material on polymeric substrates
A polymeric, patterned technology, applied in the use/removal method of circuit mask, photolithography/patterning, patterning and photolithography, etc., which can solve the problem of difficult tool repositioning
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[0061] Substrate preparation
[0062] A 250 micron thick clear polycarbonate film (available under the tradename Lexan from the General Electric Company, Fairfield, CT) at the General Electric Plastics Division in Pittsfield, Massachusetts ( GE Plastics division, Pittsfield, MA)), heat embossed with a relief pattern of recessed grid lines (complementary to raised squares). The molded tool was fabricated from a circular fused silica plate with a diameter of 10 cm by photolithography and reactive ion etching. The tool included ridges 10 microns wide and approximately 10 microns high that defined gridlines of a square grid with a pitch of 200 microns. Molding was performed by pressing with a force of 10,000 Newtons using a Model AUTO M laminating press (available from Carver, Inc., Wabash, IN), Molding Tool The polycarbonate film was pressed at 176°C for 15 minutes. The embossed film included channels 10 microns wide and approximately 10 microns deep defining gridlines of a ...
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