Method of using spherical wave front for absolute calibration of Hartmann-Shack sensor

Abstract

The invention relates to an absolute calibration method of using spherical wave front for calibrating a Hartmann-Shack sensor, and the calibration method can very accurately calibrate physical parameters and measurement precision of the Hartmann-Shack sensor. The absolute calibration method is characterized in that the absolute calibration method utilizes the corresponding relationship between the spherical wave front and output of the sensor for precisely calibrating the physical parameters of the sensor, and uses the spherical wave front to replace plane wave front used in the traditional calibration to be used as a reference beam for calibrating the Hartmann-Shack sensor. As the radii of curvature of the spherical wave front and lattice image features output by the sensor are in one-to-one relationship, actual values of the physical parameters of the Hartmann-Shack sensor can be precisely calibrated by precisely controlling the radius of curvature of the spherical wave front to be measured and mutually linking information of the images output by the sensor when in different radii of curvature with the corresponding information of the radius of curvature of the spherical wave front. The spherical wave front is used for replacing the plane wave front to be used as the reference beam for removing systematic errors; as the self-errors of the plane wave front are eliminated, theabsolute calibration method is conductive to improving the measurement precision of the Hartmann-Shack sensor.

Description

technical field [0001] The invention relates to a Hartmann-Shack sensor calibration method, in particular to a Hartmann-Shack sensor calibration method utilizing spherical wavefront absolute calibration. Background technique [0002] The Hartmann-Shack wavefront sensor is an instrument capable of detecting the wavefront shape, and it has been widely used in the fields of adaptive optics, optical mirror inspection, medical instruments and laser beam diagnosis. As a measuring instrument, the Hartmann-Shack wavefront sensor must be calibrated before it is used. There are two main tasks to be completed in the calibration. First, system errors such as assembly errors and processing errors of optical components are eliminated through calibration; Second, the physical parameters of the Hartmann-Shack sensor are calibrated to determine the proportional coefficient corresponding to the measured wavefront from the restored wavefront. [0003] In the traditional Hartmann-Shack wavefro...

AI Technical Summary

Problems solved by technology

However, in the actual calculation process, before the physical parameters of the Hartmann-Shack sensor and the parameters of the calibration device are determined, the actual curvature of the spherical wavefront is unknown, so the difference between the calculated curvature and the actual wavefront curvature Also unknown, it is unreasonable to use the difference as a known quantity

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