Air bearing structure and method for achieving air film thickness compensation

Abstract

The invention discloses an air bearing structure and a method for achieving air film thickness compensation, wherein the air bearing structure is mounted on an air-float operating platform and a base to form support, the air bearing structure comprises a micro displacement transfer mechanism which is arranged between the air-float operating platform and the base, a compensated air float pad whichorients to the bottom surface of the air-float operating platform and is mounted on one end of a lever formed by the micro displacement transfer mechanism, wherein a lubricating air film is formed between the compensated air float pad and the air-float operating platform when in work, a work air-float pad which faces to the surface of the base and is mounted on the other end of the lever formed by the micro displacement transfer mechanism, wherein a lubricating air film is formed between the work air-float pad and the base surface when in work, a loading mechanism which is used for loading the air bearing structure, and leads the working state of the compensated air float pad and the work air float pad to be the same, when air supply pressure is verified, the variation of compensated air float pad lubricating air film is overlapped on the work air-float pad through the micro displacement transfer mechanism, thereby compensating the variation of thickness of the work air-float pad air film.

Description

technical field [0001] The invention relates to air bearing technology, in particular to an air bearing structure with air film thickness compensation capability and a method for realizing air film thickness compensation. Background technique [0002] Air bearings are a widely used technology in the design of precision motion tables. The basic principle is to inject high-pressure gas between two very smooth surfaces. Due to the viscosity of the gas, a lubricating air film with a certain pressure is formed between the two smooth surfaces to separate the two surfaces of the air bearing. The two surfaces of the air bearing do not touch during movement, so it has the advantages of high speed, precision, and low friction. Air bearings (air feet) are a form of air bearings. Using 3 or more air bearing pads can support a workbench and realize two-dimensional movement on the surface of the base. Publication No. U5623853A titled "Precision motion stage with single guide beam and f...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide an air bearing structure and its method for realizing air film thickness compensation, which solves the problem of compensation for changes in air film thickness when the air supply pressure changes or even when the air source is turned off

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