Fizeau interferometer with simultaneous phase shifting

An interferogram, beam technology, applied in instruments, scientific instruments, optical radiation measurement, etc., can solve problems such as expensive and difficult

Active Publication Date: 2010-04-14
4D TECH CORP
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Problems solved by technology

[0007] Therefore, the method of Kuchel et al. requires fine-tuning of the length of the delay path, which is difficult and expensive to implement
Additionally, the presence of two incoherent beams creates a noticeable background light that can affect measurements

Method used

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  • Fizeau interferometer with simultaneous phase shifting
  • Fizeau interferometer with simultaneous phase shifting
  • Fizeau interferometer with simultaneous phase shifting

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Embodiment Construction

[0026] In general, the invention consists in the idea of ​​spatially separating test and reference beams generated by a Fizeau-type interferometer and passing each beam through an encoding filter. By producing orthogonal states of polarization for the test and reference beams, the test and reference beams can be recombined and processed in a spatial phase shifting interferometer to achieve simultaneous phase measurements.

[0027] For the purposes of the present invention, "tilt angle" means the angle between the test and reference surfaces as measured in a Fizeau interferometer relative to ideal parallel conditions. Thus, in the present invention the tilt angle is used to provide fringes of appropriate resolution for the interferometry task at hand.

[0028] The idea of ​​the present invention is to Figure 1A The interferometer device 10 is taken as an example. The source 12 of collimated light L is expanded by the expansion lens 14 , reflected off the beam splitter 16 , co...

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Abstract

The invention relates to a Fizeau interferometer with simultaneous phase shifting. Reflections (R, T) from two surfaces are separated by the inclining relation between referring and testing lenses (24, 26) of the Fizeau interferometer in space; the separated light beams (R, T) are filtered through a space polarization element (32) which provides different polarization states for the separated light beams (R, T); the separated light beams (R, T) are combined again later to form an approximately collinear light beam, and the collinear light beam is processed by a space phase interferometer (44) which is permitted to carry out quantitative phase measurement in a single video frame. The Fizeau interferometer is selectively provided with two orthorhombic and polarized light beams (104, 106) which enter a Fizeau cavity (20) at different angels so as to be approximately collinear after being reflected from the referring and testing lenses (24, 26). Needless reflections are obstructed on a focal plane by utilizing a circular hole (112), and light with short coherence length and a delay line (84) can be used for reducing scattering, decreasing measuring integral times and carrying out temporary phase average.

Description

[0001] This application is a divisional application of the patent application with the application number PCT / US2005 / 002923 (national application number: 200580047333.9) filed on January 27, 2005. The title of the invention in the original application is "Fizeau Interferometer with Simultaneous Phase Shift". [0002] related application [0003] This application is based upon and claims priority to US Provisional Patent Application No. 60 / 498,522, filed August 28,2003. technical field [0004] The invention relates to the measurement of electromagnetic wavefronts. In particular, the invention relates to the quantitative instantaneous measurement of interfering beams produced by Fizeau interferometers. Background technique [0005] Beam measurement and qualification are important in the manufacture of many optical components such as data storage laser heads. Therefore, many optical interferometry systems have been devised to improve the accuracy and reliability of measurem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01J9/02
Inventor 詹姆士·E·弥尔勒德詹姆士·C·怀恩特
Owner 4D TECH CORP
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