Position adjusting mechanism
A technology of regulating mechanism and driving mechanism, which is applied in the direction of mechanical equipment, transmission devices, electrical components, etc., can solve the problems of polluted gas, vacuum gas leaking vacuum, pollution, etc., and achieves the effect of simple and compact structure, small space occupation and low cost
Inactive Publication Date: 2010-04-14
DONGGUAN ANWELL DIGITAL MASCH CO LTD
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Problems solved by technology
During the entire transmission / lithography process, on the one hand, it is necessary to maintain a high degree of vacuum in the vacuum chamber, that is, to ensure that the vacuum gas will not leak to the outside during the entire production process; on the other hand, the quality of the gas in the vacuum chamber There is also a higher requirement, that is, to prevent the granulated powder particles of the parts from entering the vacuum chamber due to motion friction, thereby polluting the gas in the vacuum chamber and affecting the quality of the product.
However, the position adjustment mechanism does not take into account the protection of the vacuum gas in the semiconductor process, so when the position adjustment mechanism is applied to the semiconductor process, it is easy to cause the leakage of the vacuum gas in the vacuum chamber and vacuum pollution. and other issues, resulting in increased production and maintenance costs and product quality issues
Method used
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[0020] Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements. As mentioned above, since the present invention uses a driving mechanism to drive the guide plate to perform linear reciprocating motion on the spline shaft, thereby driving the push shaft fixedly connected to the guide plate and the push plate fixed to the push shaft to perform linear reciprocating motion, Furthermore, the purpose of adjusting the position is achieved, the structure is simple and compact, the cost is low, the space occupied is small and the noise during use is small.
[0021] The position adjustment mechanism of the present invention can be applied to occasions that do not require a vacuum environment and / or do not restrict gas flow. refer to figure 1 A schematic structural view of a preferred embodiment of the position adjustment mechanism of the present invention is shown. As shown in the figure, the p...
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The invention discloses a position adjusting mechanism which comprises a driving mechanism, a driving mechanism fixing plate, a guide plate, a spline shaft, a spline sleeve, a pushing shaft and a pushing plate. The driving mechanism is fixedly connected with the driving mechanism fixing plate; the spline sleeve is installed on the guide plate; one end of the spline shaft is fixedly connected with the driving mechanism fixing plate, and the other end penetrates through the spline sleeve in a sliding mode and is fixedly connected with a cavity; a driving shaft of the driving mechanism is connected with the guide plate; one end of the pushing shaft is fixedly connected with the guide plate, and the other end extends into the cavity and is fixedly connected with the pushing plate; the pushing plate is positioned in the cavity; and the driving mechanism fixing plate, the guide plate and the pushing plate are parallel to each other. The driving mechanism is adopted to drive the guide plate to make straight reciprocating motion, thereby further driving the pushing plate to make straight reciprocating motion. The invention has the advantages of compact structure, low cost, small occupation space and little noise in the use process.
Description
technical field [0001] The invention relates to a power transmission mechanism, and more particularly to a position adjustment mechanism for adjusting the position of a device in a cavity. Background technique [0002] The position adjustment mechanism is used in a wide range of occasions, especially in the automatic product production line, and the design of the position adjustment mechanism is often different due to different usage purposes. In the existing position adjustment mechanisms, the coupling and the ball screw are mostly driven by the motor reducer, and the ball screw cooperates with the slide block of the guide rail to realize the position adjustment. However, the position adjustment mechanism is complex in structure and high in cost, and due to the continuous friction of the coupling, ball screw and guide rail slider in the working process, the transmission accuracy is low, the noise is large, the transmission is unreliable and Take up a lot of space and other...
Claims
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IPC IPC(8): H01L21/00F16H25/22
Inventor 杨明生刘惠森范继良雷振宇王曼媛王勇
Owner DONGGUAN ANWELL DIGITAL MASCH CO LTD