Graphite type atomic oxygen density sensor
A density sensor and atomic oxygen technology, applied in the field of gas detection, can solve the problems of complex sensing structure, non-continuous measurement, slow response speed, etc., and achieve the effect of fast response speed, simple production and good linearity
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[0021] The present invention will be further described below in conjunction with the accompanying drawings.
[0022] like figure 1 Shown is a graphite-type atomic oxygen density sensor of the present invention, which is the basic form of the present invention. It consists of a base 1 , an insulating pad 2 , a ceramic substrate 3 , a graphite film 4 , a cover plate 5 , a lead wire 6 and a gold electrode 7 . Wherein, the insulating pad 2 is placed in the base 1, and the ceramic substrate 3 is placed on the insulating pad 2; the graphite film 4 and the gold electrode 7 are deposited on the ceramic substrate 3, and the graphite film 4 is connected to the gold electrode 7; the lead wire 6 is connected to the gold electrode 7; The gold electrodes 7 are connected, and finally, the cover plate 5 and the base 1 are tightened with screws to form a graphite-type atomic oxygen density detector.
[0023] The function of the graphite-type atomic oxygen density sensor is to detect the atom...
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