Sampling inspection method
A sampling inspection and sampling data technology, applied in the field of sampling inspection, can solve problems such as product yield decline, increase the complexity of inspection procedures, reduce the reliability of inspection steps, etc., and achieve the effect of improving production capacity
Inactive Publication Date: 2010-06-02
UNITED MICROELECTRONICS CORP
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However, when the production line expands and the number of process machines increases, this kind of random selection of product batches for inspection steps based on the sampling inspection ratio will produce blind spots where the process step results of some machines are only inspected once a long time
[0004] In this way, when a process problem occurs in a process machine, which causes defects in products in the same product batch, and the process results of this process machine have not been sampled, it will lead to a decline in product yield and a decrease in inspection credibility of steps
However, in a production line with many process machines, the inspection of the process results must be completed one by one to achieve a 100% inspection result, which will increase the complexity of the inspection program and lengthen the time required to perform the inspection steps
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[0030] figure 1 A schematic flowchart of a sampling inspection method according to a preferred embodiment of the present invention is shown. Please refer to figure 1 , on a multi-product production line with multiple tools, firstly, provide a tool record (step S101), wherein the tool record stores a sampling data of each tool. The above-mentioned multi-product production line is, for example, a production line that can produce a variety of different products at the same time, and the equipment on this production line is grouped according to a process type performed by each equipment, so that the equipment on the production line is grouped into Multiple device groups. Furthermore, each of the above sampled data respectively records a latest inspection time of the corresponding equipment.
[0031] figure 2 A schematic diagram of a device record according to a preferred embodiment of the present invention is shown. Please refer to figure 2 , in this embodiment, the equipm...
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The invention relates to a sampling inspection method suitable for a multi-product production line with multiple equipment, comprising the steps of: providing a tool record, wherein the tool record stores the sampling data of each equipment; then inspecting each sampling data of the tool record to fine at least one equipment without being sampled from the multiple equipment; then determining multiple product batches of at least one technological operation executed by one of the at least one equipment without being sampled; and finally determining at least one of the product batches for sampling inspection.
Description
technical field [0001] The present invention relates to a sampling method, and in particular to a sampling inspection method. Background technique [0002] A semiconductor process line has many process steps, such as film formation steps, lithography process steps, etc., and also has many inspection steps to verify the results of certain process steps. [0003] In an inspection step, by inspecting the physical properties of a finished product or semi-finished product, it is judged whether there is a defect, and then it is deduced whether the state of various machines in the previous steps of the product is normal. Most of the inspection procedures currently performed on the production line are sampling inspections. That is, different sampling inspection ratios are set for various machine types corresponding to various process steps, and under the control of the sampling inspection ratio, random sampling of product batches is performed for inspection steps. In the case of a...
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IPC IPC(8): G05B21/00
Inventor 黄凯斌蔡松霖黄健安钟文华
Owner UNITED MICROELECTRONICS CORP