Stacked piezoelectric element and piezoelectric pump
A piezoelectric element, layered technology, applied in electrical elements, pumps with flexible working elements, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problems of complex wiring, short circuit, complex driving circuit, etc. achieve the effect of improving reliability
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[0088] Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention while referring to the drawings.
[0089] image 3 is a schematic plan view of a piezoelectric pump according to an embodiment of the present invention, Figure 4 is along image 3 The cross-sectional view of the X-X line, Figure 5 It is a cross-sectional view along the Y-Y line.
[0090] The piezoelectric pump 1 has a pump body 2 . In the present embodiment, the pump main body 2 is a disk-shaped member having a concave portion formed on the upper surface. The pump main body 2 is formed of a relatively rigid material such as metal or synthetic resin.
[0091] The piezoelectric element 3 is arranged so as to close the recess of the pump body 2 . The piezoelectric element 3 has a unimorph structure in which a laminated piezoelectric element 5 is fixed to the upper surface of a diaphragm 4 formed of a metal plate. The details of this multi-layer piezoele...
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