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Stacked piezoelectric element and piezoelectric pump

A piezoelectric element, layered technology, applied in electrical elements, pumps with flexible working elements, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problems of complex wiring, short circuit, complex driving circuit, etc. achieve the effect of improving reliability

Inactive Publication Date: 2010-09-22
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, since the potentials applied to the central electrode 1005 formed on the outer surface of the first piezoelectric body 1002 and the peripheral electrodes 1006 are different, a short circuit due to migration may occur between them.
Similarly, on the lower surface of the second piezoelectric body 1003, a short circuit may also occur between the central electrode 1007 and the peripheral electrode 1008.
[0011] In addition, as shown in 13, complicated wiring is required, and an inverter 1011 is also required, so that the driving circuit is complicated.

Method used

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  • Stacked piezoelectric element and piezoelectric pump
  • Stacked piezoelectric element and piezoelectric pump
  • Stacked piezoelectric element and piezoelectric pump

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Embodiment Construction

[0088] Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention while referring to the drawings.

[0089] image 3 is a schematic plan view of a piezoelectric pump according to an embodiment of the present invention, Figure 4 is along image 3 The cross-sectional view of the X-X line, Figure 5 It is a cross-sectional view along the Y-Y line.

[0090] The piezoelectric pump 1 has a pump body 2 . In the present embodiment, the pump main body 2 is a disk-shaped member having a concave portion formed on the upper surface. The pump main body 2 is formed of a relatively rigid material such as metal or synthetic resin.

[0091] The piezoelectric element 3 is arranged so as to close the recess of the pump body 2 . The piezoelectric element 3 has a unimorph structure in which a laminated piezoelectric element 5 is fixed to the upper surface of a diaphragm 4 formed of a metal plate. The details of this multi-layer piezoele...

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Abstract

Provided are a piezoelectric element in which a large amount of displacement can be obtained and the migration between electrodes does not tend to occur, and a piezoelectric pump using the piezoelectric element. Provided are a stacked piezoelectric element (5) in which a first and second excitation electrodes (26, 27) face each other with a first piezoelectric layer (21) interposed therebetween in a central region of a stacked piezoelectric body, third and fourth excitation electrodes (28, 29, 30, 31) face each other with a second piezoelectric layer (22) interposed therebetween in a peripheral portion of the piezoelectric body, the polarization direction and electric field application direction in a first driving region in which the first and second excitation electrodes (26, 27) face each other and the polarization direction and electric field application direction in a second driving region in which the third excitation electrodes (28, 29) and the fourth excitation electrodes (30, 31) face each other are the same direction, and the second excitation electrode (27) and the third excitation electrodes (28, 29) are separated in a thickness direction, and a piezoelectric pump (1) for discharging liquid by using a bending displacement in a central portion of the stacked piezoelectric element (5).

Description

technical field [0001] The present invention relates to a stacked piezoelectric element and a piezoelectric pump used in, for example, a piezoelectric pump, and more specifically, to a stacked piezoelectric element in which a central portion and a peripheral portion surrounding the central portion are bent and displaced in opposite directions, and A piezoelectric pump using the laminated piezoelectric element. Background technique [0002] Conventionally, there is known a piezoelectric pump that discharges a liquid or the like using a piezoelectric element. The piezoelectric pump includes a pump body having a pump chamber, and a piezoelectric element fixed to the pump body to close an opening of the pump chamber. When a voltage is applied and the voltage element is bent and displaced, the displacement of the piezoelectric element changes the volume of the pump chamber, whereby liquid is introduced into or discharged from the pump chamber. [0003] In order to obtain a larg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/083F04B43/04H01L41/187H01L41/22H02N2/00H01L41/257H01L41/273H01L41/29
CPCH01L41/083H01L41/047F04B43/046H01L41/0926H01L41/273H10N30/871H10N30/2047H10N30/50H10N30/053
Inventor 长尾信哉西村俊雄西川雅永
Owner MURATA MFG CO LTD