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Multi-dimensional manipulator driving device for special equipment of semiconductor

A technology of special equipment and driving device, which is applied in manipulators, manufacturing tools, etc., can solve the problems of loose structure of motor driving device, high cost of direct drive motor device, difficult control, etc., and achieve compact structure, simple structure and easy precision Effect

Inactive Publication Date: 2010-10-20
CETC BEIJING ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a multi-dimensional manipulator drive device for semiconductor special equipment, which solves the technical problems of traditional motor drive devices such as loose structure, low precision, and difficult control; and solves the problem of high cost of direct drive motor devices

Method used

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  • Multi-dimensional manipulator driving device for special equipment of semiconductor
  • Multi-dimensional manipulator driving device for special equipment of semiconductor

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Embodiment Construction

[0012] The present invention will be described in further detail below with reference to the accompanying drawings.

[0013] as attached figure 1 As shown, the multi-dimensional manipulator driving device for semiconductor special equipment of the present invention includes a direct drive motor 1, a rotating shaft 2, a connecting seat 3, a bearing 4, an inner spacer 5, an outer spacer 6, a bearing retaining ring 7, and a bearing gland 8 , bearing lock nut 9, coupling 10, rotary servo motor 11, reducer 12, bearing seat 13, base 14; the rotating shaft 2 is a hollow shaft that runs through the transmission direct drive motor 1 and the connecting seat 3, and the upper end of the connecting seat 3 is connected to the The lower end of the transmission direct drive motor 1 is connected, the lower end of the connecting seat 3 is installed on the rotating shaft 2, the bearing seat 13 is installed on the upper end of the base 14, the bearing seat 13 and the rotating shaft 2 are supporte...

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Abstract

The invention discloses a multi-dimensional manipulator driving device for special equipment of a semiconductor, which comprises a transmission direct drive motor which is directly connected with a rotating shaft, and a rotary servo motor which is indirectly connected with the rotating shaft, wherein the rotating shaft is a hollow shaft which is penetrated through the transmission direct drive motor and a connection base, the upper end of the connection base is connected with the lower end of the transmission direct drive motor, the lower end of the connection base is installed on the rotating shaft, a bearing block is installed at the upper end of a base, a bearing is supported between the bearing block and the rotating shaft, a coupling, a bearing lock nut, a bearing retainer, a bearing cover, the bearing, an inner ring spacer and an outer ring spacer are installed at the lower end of the rotating shaft, the bearing cover compresses the bearing and is installed at the lower end of the bearing block, the upper end of a deceleration machine is mounted at the lower end of the base, and the lower end of the deceleration machine is provided with the rotary servo motor. The driving interface of the rotary servo motor is connected with an upper computer. The invention has the characteristics of large moment, high precision, low cost, compact structure and convenient installation and maintenance.

Description

technical field [0001] The invention relates to a multi-dimensional manipulator drive device, in particular to a direct drive motor drive device for joint rotation of a multi-dimensional manipulator for semiconductor special equipment. Background technique [0002] In the manufacturing process of semiconductor-specific equipment, it is a key technology to use multi-dimensional manipulators to realize automatic transfer of silicon wafers. A multi-dimensional manipulator generally has more than two rotating joints, and a motor drive device is arranged on each joint to drive the joint to rotate, and the motion trajectory of the end of the manipulator is the synthesis of several joint movements. The end of the traditional manipulator has a large amount of data calculation during transmission, and the cost of the motion system is high. The traditional motor drive device has a loose structure, low precision, and is not easy to control. SUMMARY OF THE INVENTION [0003] The purp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J13/00
Inventor 张玮琪衣忠波张文斌
Owner CETC BEIJING ELECTRONICS EQUIP
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