The invention discloses a multi-dimensional
manipulator driving device for special equipment of a
semiconductor, which comprises a transmission direct
drive motor which is directly connected with a rotating shaft, and a rotary
servo motor which is indirectly connected with the rotating shaft, wherein the rotating shaft is a hollow shaft which is penetrated through the transmission direct
drive motor and a connection base, the upper end of the connection base is connected with the lower end of the transmission direct
drive motor, the lower end of the connection base is installed on the rotating shaft, a bearing block is installed at the upper end of a base, a bearing is supported between the bearing block and the rotating shaft, a
coupling, a bearing lock nut, a bearing
retainer, a bearing cover, the bearing, an inner ring spacer and an outer ring spacer are installed at the lower end of the rotating shaft, the bearing cover compresses the bearing and is installed at the lower end of the bearing block, the upper end of a deceleration
machine is mounted at the lower end of the base, and the lower end of the deceleration
machine is provided with the rotary
servo motor. The driving interface of the rotary
servo motor is connected with an upper computer. The invention has the characteristics of large moment, high precision, low cost, compact structure and convenient installation and maintenance.