Antioxidation method for finishing fuse

Abstract

The invention provides an antioxidation method for finishing a fuse. The method comprises the following steps: measuring the impedance of a fuse probe; judging whether the impedance of the fuse probe is larger than a higher limit value or not, cleaning the fuse probe and returning to the previous step if so, otherwise executing the following steps; setting the output voltage of a fuse circuit according to a formula V=R*I, wherein the V is the output voltage of the fuse circuit, the R is the impedance of the fuse probe, and the I is the blowout current of the fuse; and fusing the selected fuse. The antioxidation method for finishing the fuse can improve the success ratio for fusing the fuse, and ensures that the success ratio for fusing the fuse tends to be stable; and the service life of the fuse probe can be prolonged by using the antioxidation method for finishing the fuse.

Description

technical field [0001] The invention relates to wafer testing, in particular to a method for anti-oxidation and trimming of fuses. Background technique [0002] Integrated circuit mid-test refers to the use of specialized equipment to test the performance parameters of integrated circuits on wafers. In the integrated circuit test, in order to optimize the performance of the integrated circuit, it is often necessary to trim the fuse of the integrated circuit to select a suitable internal circuit module. [0003] The fuse of the integrated circuit is made of an alloy with a low melting point, the impedance of the fuse is 0 ohms, and each fuse short-circuits an internal circuit module. [0004] Trimming the fuse is to blow the fuse with a large current. [0005] see figure 1 , the prior art method for repairing the fuse comprises the following steps: [0006] Step 1, measuring the parameters of the integrated circuit on the wafer, at this time, the measured value is the ini...

AI Technical Summary

Problems solved by technology

[0012] Repairing the fuse requires a large current to flow through the fuse to heat the fuse. Therefore, the current passing through the fuse probe is also relatively large, and the fuse probe is easily oxidized, and the impedance of the oxidized fuse probe changes. Large, when the impedance of the fuse probe becomes larger, the current transmitted to the fuse through the fuse probe will become smaller, which will reduce the success rate of blowing the fuse

In order to improve the success rate of blowing the fuse, the measure taken in the prior art is to regularly clean the fuse probe according to experience. This measure is simple and easy to operate, but it cannot grasp the oxidation situation of the fuse probe in time, and the fuse probe is Oxidation speeds are different in different stages of the life cycle. Therefore, the method of repairing the fuse in the prior art will gradually reduce the success rate of blowing the fuse, that is, the success rate of blowing the fuse tends to be unstable.

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