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Coating apparatus

A coating device and coating technology, applied in the direction of the device for coating liquid on the surface, spraying device, lighting device, etc.

Inactive Publication Date: 2012-10-10
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, even with such an exhaust device, it is impossible to completely prevent the generated dust from flowing out from the above-mentioned closed space to the space where the slide reciprocates.

Method used

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no. 1 approach

[0170] Next, a coating device 1 according to a first embodiment of the present invention will be described with reference to the drawings. The first embodiment is a coating device 1 in which an exhaust pipe is not provided in a chamber space but an exhaust pipe is provided in a box space or a slide space. In addition, description is omitted about the outline|summary of the coating apparatus 1, and it demonstrates mainly about the connection part of the supply pipe and the exhaust pipe which are the characteristics of 1st Embodiment. also, Figure 11 It is a schematic diagram showing a first example of a flow of nitrogen gas in the coating device 1 of the first embodiment. Figure 12 It is a schematic diagram which shows the 2nd example of the flow of nitrogen gas in the coating apparatus 1 of 1st Embodiment. Figure 13 It is a schematic diagram which shows the 3rd example of the flow of nitrogen gas in the coating apparatus 1 of 1st Embodiment. Figure 14 It is a schematic ...

no. 2 approach

[0180] Next, a coating device 1 according to a second embodiment of the present invention will be described with reference to the drawings. The second embodiment is a coating device 1 in which exhaust pipes are not provided in the chamber space, but exhaust pipes are respectively provided in the box space and the slide space. In addition, description is omitted about the outline|summary of the coating apparatus 1, and it demonstrates mainly about the connection part of the supply pipe and the exhaust pipe which are the characteristics of 2nd Embodiment. also, Figure 15 It is a schematic diagram showing the first example of the flow of nitrogen gas in the coating device 1 of the second embodiment. Figure 16 It is a schematic diagram which shows the 2nd example of the flow of nitrogen gas in the coating apparatus 1 of 2nd Embodiment. Figure 17 It is a schematic diagram which shows the 3rd example of the flow of nitrogen gas in the coating apparatus 1 of 2nd Embodiment. In ...

no. 3 approach

[0188] Next, a coating device 1 according to a third embodiment of the present invention will be described with reference to the drawings. The third embodiment is a coating device 1 in which an exhaust pipe is provided in a chamber space, and an exhaust pipe is provided in a box space or a sliding space. In addition, description is omitted about the outline|summary of the coating apparatus 1, and it demonstrates mainly about the connection part of the supply pipe and the exhaust pipe which are the characteristics of 3rd Embodiment. also, Figure 18 It is a schematic diagram showing the first example of the flow of nitrogen gas in the coating apparatus 1 of the third embodiment. Figure 19 It is a schematic diagram showing the second example of the flow of nitrogen gas in the coating apparatus 1 of the third embodiment. Figure 20 It is a schematic diagram which shows the 3rd example of the flow of nitrogen gas in the coating apparatus 1 of 2nd Embodiment. In addition, in ...

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Abstract

Disclosed are a coating apparatus and a coating method. The coating apparatus has an objective table, a jet nozzle and a local environment generation mechanism; a substrate is loaded on the objective table; the jet nozzle is disposed in the space upon the objective table, and coating liquid is jetted out from the front end of the jet nozzle; the local environment generation mechanism supplies predetermined gases to the space where the jet nozzle jets out coating liquid and the space on the coated parts of the coated substrate; thereby the coating is performed in a predetermined environment.

Description

[0001] This application is a divisional application of a patent application with the application number 200710084320.X, the filing date being February 27, 2007, and the invention title being "coating device and coating method". technical field [0002] The present invention relates to a coating device and a coating method, and more particularly, to a coating device and a coating method for spraying a coating liquid such as an organic EL material from a nozzle onto a substrate mounted on a stage to coat the substrate. Background technique [0003] Conventionally, various developments have been made on coating devices for coating coating liquids on objects to be processed such as substrates. For example, in a device for manufacturing an organic EL (Electro Luminescence: electroluminescence) display device, such a coating device is used: the main surface of a substrate such as a glass substrate loaded on a stage is sprayed in a predetermined pattern shape through a nozzle. A ho...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05B13/04B05B15/08B05B12/08B05B15/04B05D7/00B05D3/00H05B33/10B05B15/68
CPCH01L21/67017H01L21/6715H10K71/10H10K71/00
Inventor 吉田顺一增市干雄高村幸宏上野博之川越理史松家毅
Owner DAINIPPON SCREEN MTG CO LTD
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