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Coating device

A coating device and coating technology, applied in the direction of surface coating liquid devices, lighting devices, spraying devices, etc.

Inactive Publication Date: 2010-10-13
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, even with such an exhaust device, it is impossible to completely prevent the generated dust from flowing out from the above-mentioned closed space to the space where the slide reciprocates.

Method used

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Experimental program
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no. 1 approach

[0169] Next, a coating device 1 according to a first embodiment of the present invention will be described with reference to the drawings. The first embodiment is a coating device 1 in which an exhaust pipe is not provided in a chamber space but an exhaust pipe is provided in a box space or a sliding space. In addition, description is omitted about the outline|summary of the coating apparatus 1, and it demonstrates mainly about the connection part of the supply pipe and the exhaust pipe which are the characteristics of 1st Embodiment. also, Figure 11 It is a schematic diagram showing a first example of a flow of nitrogen gas in the coating device 1 of the first embodiment. Figure 12 It is a schematic diagram which shows the 2nd example of the flow of nitrogen gas in the coating apparatus 1 of 1st Embodiment. Figure 13 It is a schematic diagram which shows the 3rd example of the flow of nitrogen gas in the coating apparatus 1 of 1st Embodiment. Figure 14 It is a schemati...

no. 2 approach

[0179] Next, a coating device 1 according to a second embodiment of the present invention will be described with reference to the drawings. The second embodiment is a coating device 1 in which exhaust pipes are not provided in the chamber space, but exhaust pipes are respectively provided in the box space and the slide space. In addition, description is omitted about the outline|summary of the coating apparatus 1, and it demonstrates mainly about the connection part of the supply pipe and the exhaust pipe which are the characteristics of 2nd Embodiment. also, Figure 15 It is a schematic diagram showing the first example of the flow of nitrogen gas in the coating device 1 of the second embodiment. Figure 16 It is a schematic diagram which shows the 2nd example of the flow of nitrogen gas in the coating apparatus 1 of 2nd Embodiment. Figure 17 It is a schematic diagram which shows the 3rd example of the flow of nitrogen gas in the coating apparatus 1 of 2nd Embodiment. In ...

no. 3 approach

[0187] Next, a coating device 1 according to a third embodiment of the present invention will be described with reference to the drawings. The third embodiment is a coating device 1 in which an exhaust pipe is provided in a chamber space, and an exhaust pipe is provided in a box space or a sliding space. In addition, description is omitted about the outline|summary of the coating apparatus 1, and it demonstrates mainly about the connection part of the supply pipe and the exhaust pipe which are the characteristics of 3rd Embodiment. also, Figure 18 It is a schematic diagram showing the first example of the flow of nitrogen gas in the coating apparatus 1 of the third embodiment. Figure 19 It is a schematic diagram showing the second example of the flow of nitrogen gas in the coating apparatus 1 of the third embodiment. Figure 20 It is a schematic diagram which shows the 3rd example of the flow of nitrogen gas in the coating apparatus 1 of 2nd Embodiment. In addition, in ...

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PUM

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Abstract

A coating apparatus as well as coating method, wherein the coating apparatus comprises an objective table, a nozzle as well as a local environment generating mechanism. The objective table loads the base plate on its upper surface. The nozzle spurts out coating liquor from its frontend part, at the room above the objective table. The local environment generating mechanism partly supplies preceptive gas to the room containing coating liquor spurted out by the nozzle and the coating room of the coating sites of the base plate coated with the coating liquor so as to the coating of the coating liquor is executed at prescribed environment.

Description

technical field [0001] The present invention relates to a coating device and a coating method, and more particularly, to a coating device and a coating method for spraying a coating liquid such as an organic EL material from a nozzle onto a substrate mounted on a stage to coat the substrate. Background technique [0002] Conventionally, various developments have been made on coating devices for coating coating liquids on objects to be processed such as substrates. For example, in a device for manufacturing an organic EL (Electro Luminescence: electroluminescence) display device, such a coating device is used: the main surface of a substrate such as a glass substrate loaded on a stage is sprayed in a predetermined pattern shape through a nozzle. A hole transport material or an organic EL material is applied. In this coating device, a coating liquid (organic EL material or hole transport material) is ejected from a nozzle at a predetermined pressure. Specifically, after the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/02B05B13/04B05C13/02B05C11/10H05B33/10
Inventor 吉田顺一增市干雄高村幸宏上野博之川越理史松家毅
Owner DAINIPPON SCREEN MTG CO LTD
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