Vacuum coating apparatus and method
A coating equipment and coating technology, applied in the direction of vacuum evaporation plating, coating, metal material coating process, etc., can solve the problem of not being able to respond in time
Inactive Publication Date: 2010-12-22
APPLIED MATERIALS INC
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Problems solved by technology
Therefore, when the layer thickness deviates from the nominal range, it cannot react in time
Method used
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[0041] figure 1 is a schematic diagram of a tape coating system 1 according to the invention.
[0042] The belt coating system 1 comprises a first pulley 2 which provides support for an elongated flexible metal or Al / Mo coated metal substrate 3 wound on the first pulley 2 . Furthermore, the belt coating system 1 also comprises a second pulley 4 (take-up pulley) for taking up the coated substrate 3 .
[0043] The coating process performed in the tape coating system 1 is a continuous coating process. During this coating process, the first pulley 2 as well as the second pulley 4 are rotated to continuously move the substrate 3 past the coating tool 5 to deposit coating particles 6 on the surface 3 ′ of the substrate 3 .
[0044] After passing through the coating area at speed v, the substrate bearing the coating film 7 on its surface 3' passes through an IR spectroscopic measuring device 8 for measuring the IR reflection spectrum of the coating film 7 to determine the coating. ...
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Abstract
A strip coating system 1 according to the present invention comprises a first pulley 2 carrying a flexible metal or Al substrate 3 wound up on the first pulley 2. Furthermore, the strip coating system 1 has a second pulley 4 (take-up pulley) for taking up the coated substrate 3. The coating process carried out in the strip coating system 1 is a continuous coating process. During the coating process the first pulley 2 and the second pulley 4 are rotated to move the substrate 3 continuously past a coating tool 5 for depositing coating particles 6 on a surface 3' of the substrate 3. After having passed the coating section with a speed v the substrate 3 carrying a coating film 7 on the surface 3' thereof passes an IR spectroscopic measurement device 8 for measuring the layer thickness of the coating film 7. An arrow 9 indicates a feedback control between the IR measurement device 8 and the coating tool 5. The feedback control 9 controls one or a plurality of process parameters of the coating tool 5 responsive to the measurement of the thickness of the coating film 7 detected by the measurement tool 8. Thus, an in-situ on-line measurement of the thickness of the coating film 7 may be implemented.
Description
technical field [0001] The invention relates to a vacuum coating apparatus comprising a coating chamber, a coating tool for depositing a coating on a substrate located in the coating part of the coating chamber, and a tool for determining the deposition on said substrate. A device for determining the physical properties (especially thickness) of a coating. Furthermore, the present invention relates to a method for producing a coating film on a substrate, comprising the steps of: a) arranging a continuously moving substrate in a coating chamber; When coating a region, a coating film having specific physical properties (particularly thickness) is deposited on the first region of the surface of the substrate within the coating region; and c) by using infrared rays (IR ) spectrometry to determine a physical characteristic, in particular thickness, of said coating film deposited on said first region of the surface of said substrate located in a coating chamber downstream of a coat...
Claims
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IPC IPC(8): C23C14/54C23C16/52C23C14/56C23C16/54
CPCC23C14/547C23C16/52C23C16/545C23C14/562
Inventor 汉斯-乔格·罗茨彼得·索尔
Owner APPLIED MATERIALS INC