Turbo molecular pump
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- OERLIKON LEYBOLD VACUUM
- Publication Date
- 2011-01-19
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
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Abstract
Description
technical field
[0001] The invention relates to a turbomolecular pump. Background technique
[0002] A turbomolecular pump has a rotor connected to a drive shaft with a plurality of rotor blades. Stationary stator disks are arranged between the individual rotor blades. Usually, the stator disk is not directly connected to the pump casing, but is supported by the stator ring. In this case, each rotor vane is provided with a stator ring, wherein the stator ring is placed over the rotor for assembly. A gap must be provided between the rotor blades or rotor blade tips and the stationary housing or stator ring. This play is necessary in order to prevent the rotor blades from contacting stationary parts, ie the housing or the stator ring, in all operating states. In this case, the width of the gap must be so large that thermal expansion of the rotor blades can occur in all operating states without contact with stationary parts. Furthermore, with regard to the width of the gap...