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Magnetron coil material powder for magnetron cathode and preparation method thereof

A magnetron cathode and magnetron coil technology, applied in the field of powder metallurgy manufacturing, can solve the problems of long process and high manufacturing cost, and achieve the effects of reducing process cost, improving efficiency and strong adsorption capacity

Active Publication Date: 2012-08-22
XIAMEN HONGLU TUNGSTEN MOLYBDENUM IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method has a long process and high manufacturing cost.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0020] Blue tungsten WO with a Fischer particle size of 16.5 μm, an ammonia content of 0.22mt%, and an oxygen index of 2.92 2.9 The powder and thorium nitrate solution are mixed and doped according to a certain ratio. Among them, blue tungsten WO 2.9 The powder mass fraction is 98.34mt%, and the thorium nitrate reagent mass fraction is 1.66mt%. Put the doped and dried powder into the reduction furnace for reduction, the loading capacity of the reduction boat is 700g / boat, the reduction boat speed is 20min / boat, the sintering atmosphere is hydrogen, and the hydrogen flow rate is 20m 3 / h, the obtained reduced tungsten powder has a Fischer particle size of 2.1um, which is suitable for powder metallurgy molding, and the thorium is evenly distributed.

example 2

[0022] Blue tungsten WO with a Fischer particle size of 15.2 μm, an ammonia content of 0.15 mt%, and an oxygen index of 2.90 2.9 The powder and thorium nitrate solution are mixed and doped according to a certain ratio. Among them, blue tungsten WO 2.9 The powder mass fraction is 96.70mt%, and the thorium nitrate reagent mass fraction is 3.30mt%. Put the doped and dried powder into the reduction furnace for reduction, the reduction boat load is 500g / boat, the reduction speed is 20min / boat, the sintering atmosphere is hydrogen, and the hydrogen flow rate is 23m 3 / h, the obtained reduced tungsten powder has a Fischer particle size of 1.1um, which is suitable for powder metallurgy molding, and the thorium is evenly distributed.

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Abstract

The invention provides magnetron coil material powder for magnetron cathode and a preparation method thereof, belonging to the field of powder metallurgy manufacturing. The powder is prepared by the following materials of 96.37-98.68mt% of blue tungsten WO2.9 powder, 1.32-3.63mt% of nitric acid thorium blue tungsten WO2.9 powder and a nitric acid thorium solution. The preparation method comprisesthe following steps of: powder preparation, doping, reduction and the like In the invention, since tungsten WO2.9 particles which have the characteristics of porous cellular structure, strong adsorption capacity, good surface activity and the like is adopted, nitric acid thorium and tungsten WO2.9 can be uniformly doped. The doped powder is dried and reduced, and reduction is performed in a reduction furnace. By adopting process control of H2 atmosphere and temperature and the like, uniformly-mixed thorium tungsten powder suitable for powder metallurgic forming is obtained.

Description

technical field [0001] The invention relates to a preparation process of a magnetron coil raw material powder for a magnetron cathode, and belongs to the field of powder metallurgy manufacturing. Background technique [0002] The core component of the magnetron cathode assembly, the magnetron coil, requires uniform distribution of ThO in the tungsten matrix 2 Particles, the current preparation process of the magnetron coil raw material powder for the magnetron cathode is to use ammonium paratungstate APT to burn yellow tungsten WO 3 As a raw material, through doping, high-temperature firing, and one-time reduction to doped WO 2 , secondary reduction to doped W powder. But this method process is longer, and the manufacturing cost is higher. The invention provides a preparation process of a magnetron coil raw material powder for a magnetron cathode. By changing the raw material formula, the raw material powder with lower cost and simple process is prepared. Contents of th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B22F1/00B22F9/22
Inventor 王竹青方毅金
Owner XIAMEN HONGLU TUNGSTEN MOLYBDENUM IND CO LTD
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