Parallel piezoelectric micromotion platform

Abstract

The invention discloses a parallel piezoelectric micromotion platform which comprises a platform body and a moving platform. The parallel piezoelectric micromotion platform is characterized in that elastic deformation bodies are integrally arranged at four right angles between the platform body and the moving platform; each elastic deformation body comprises two oppositely-arranged convex-concavecircular arc-shaped elastic thin sheets with equal diameters and arc lengths; both ends of each circular arc-shaped elastic thin sheet are integrally connected with the internal right angle of the platform body and the external right angle of the moving platform; at least one guide hinge is arranged on at least one side surface of the moving platform; a piezoelectric ceramic actuator is fixedly arranged between the guide hinge and the inner side surface of the platform body right opposite to the guide hinge; and the transverse cross section of the guide hinge is coincided with that of the piezoelectric ceramic actuator. The parallel piezoelectric micromotion platform has the advantages that both the translational micro-displacement and the rotary micro-displacement can be realized, so that the one-dimensional, the two-dimensional and the three-dimensional micro-displacement can be conveniently realized; the parallel piezoelectric micromotion platform has high integral rigidity and natural frequency; and the installation of the displacement sensor is not limited.

Description

technical field [0001] The invention relates to a micro-displacement mechanism used in micro / nano positioning systems such as ultra-precision machining and cell micro-operation, in particular to a parallel piezoelectric micro-motion platform. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism driven by a piezoelectric ceramic actuator that can produce micron or nanometer-level motion accuracy and motion resolution. It can be applied to ultra-precision machining, large-scale integrated circuit manufacturing, and scanning probe microscopy. , bioengineering and other cutting-edge technology fields. [0003] Parallel piezoelectric micro-motion platform is a mechanism that realizes micro-motion in each direction of motion only through a group of elastic units and a moving platform. The series piezoelectric micro-motion platform has a simple and compact structure and a large effective working surface; at the same time, since ...

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Problems solved by technology

[0004] (1) Only one-dimensional or two-dimensional translational micro-displacement can be produced, and no rotational micro-displacement can be produced. If translational and rotational micro-displacement is to be produced at the same time, it needs to be superimposed on the moving platform that realizes translational micro-displacement. A moving platform that realizes rotating micro-displacement in one dimension, which makes the entire micro-moving platform complex in structure, large in size, heavy in mass, and low in natural frequency;

[0005] (2) The installation of displacement sensors is limited, especially for precision displacement sensors such as capacitive sensors and differential transformer inductive sensors, only the non-driving side of the moving platform can be used as the measured surface, and displacement sensors and piezoelectric sensors are also required. The axis of the ceramic actuator should be in the vertical bisector of the side of the moving platform

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