Comb tooth capacitor of micromachine

Abstract

The invention provides a comb tooth capacitor of a micromachine, and relates to the field of micro-electronic machines. The capacitor comprises a fixed comb tooth electrode and a movable comb tooth electrode, wherein the fixed comb tooth electrode and the movable comb tooth electrode overlapped to form a decoupling comb tooth capacitor; and when the movable comb tooth electrode and the fixed comb tooth electrode oppositely carry out out-of-plane motion under the action of external force, the capacitance for the comb tooth capacitor of the micromachine does not changed. The comb tooth capacitor of the capacitor is low in cost and simple in structure, can effectively solve the problem of mode coupling for an actuator of a micromachine gyroscope and the problem of intersecting axle sensitivity of the micromachine gyroscope and an acceleration transducer.

Description

technical field [0001] The present invention relates to the field of micro-electromechanical, in particular, to a micro-mechanical comb capacitor. Background technique [0002] With the development of semiconductor microfabrication technology and ultra-precision machining technology, Micro Electro Mechanical System (MEMS, Micro Electro Mechanical System) has also developed rapidly. MEMS has significant advantages such as small size, light weight, low cost, low power consumption and easy integration, and is widely used in military, economic, medical, electronic and aerospace fields. [0003] Micromachined comb capacitors implemented with MEMS technology are widely used as sensors or actuators, and micro-inertial devices are one of their important applications, including micromachined gyroscopes and micromachined accelerometers. Among them, the micro-mechanical gyroscope is a micro-inertial device used to measure angular velocity, and the accelerometer is a micro-inertial de...

AI Technical Summary

Problems solved by technology

For a long time, the modal coupling problem has been the main bottleneck restricting the development of micromechanical gyroscopes

[0006]In short, a technical problem that needs to be solved urgently by those skilled in the art is: how to realize a low-cost, simple-structured micromechanical comb capacitor to effectively solve the problem of Coupling of Sensing Modes to Driving Modes in Mechanical Gyroscopes and Cross-Axis Sensitivity of Micromachined Inertial Sensors

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