Supercharge Your Innovation With Domain-Expert AI Agents!

Vibrating micro-mechanical sensor of angular velocity

An angular velocity sensor, micro-mechanical technology, applied in the direction of gyroscopic effect for velocity measurement, velocity/acceleration/shock measurement, instruments, etc.

Active Publication Date: 2011-05-18
MURATA MFG CO LTD
View PDF7 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, it has proven to be a challenge to achieve cost-effectiveness when measuring angular velocity in a component with respect to an axis in the plane of a surface and with respect to an axis perpendicular to that surface plane

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Vibrating micro-mechanical sensor of angular velocity
  • Vibrating micro-mechanical sensor of angular velocity
  • Vibrating micro-mechanical sensor of angular velocity

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0035] Figure 4 A functional structural diagram of the vibrating micromachined angular velocity sensor with three axes of the present invention is shown. The vibration-type micromechanical angular velocity sensor with three axes described in the present invention includes a rotating mass 34, which is supported by the support structure 19 at the center through springs 28 and 29, and is passed in the X-axis direction by Springs 30,31 are supported by excitation frame structures 32,33. The rotating block 34 also includes electrodes 37 - 40 . In addition, the three-axis vibrating micromechanical angular velocity sensor of the present invention also includes linear blocks 35 and 36 , and these linear blocks are supported by the excitation frame structures 32 and 33 via springs 45 and 46 in the X-axis direction. The excitation frame structures 32, 33 are supported by the frame 23 around the sensor through the bending springs 24-27 in the Y-axis direction. In addition, the vibrat...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention is adapted to measure angular velocity in relation to two or three axes, and at the least two seismic masses (34-36, 52-53, 71-75) of the sensor of angular velocity are adapted to be activated into primary motion vibration by means of a common mode. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small size vibrating micro-mechanical sensors of angular velocity.

Description

technical field [0001] The present invention relates to a measuring device for measuring angular velocity, and more particularly, to a vibrating micromechanical angular velocity sensor. The object of the present invention is to provide an improved sensor structure which enables reliable measurements with two degrees of freedom or three degrees of freedom and with good performance, especially in small vibrating micromechanical angular velocity sensor solutions. Background technique [0002] It has been proved that the measurement technology based on the vibration type angular velocity sensor is a simple concept and very reliable angular velocity measurement method. The most commonly used vibration-type angular velocity sensors operate on the so-called tuning fork principle. [0003] In a vibration type angular velocity sensor, a certain known main motion is generated and sustained in the sensor. Subsequently, the movement to be measured by the sensor is detected as a deviat...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01P3/44G01P9/04B81B3/00
CPCG01C19/5747G01C19/5762G01C19/5712
Inventor 安斯·布卢姆奎斯特
Owner MURATA MFG CO LTD
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com