107results about How to "High deposition rate" patented technology

An in-situ hybrid film deposition method for forming a high-k dielectric film on a plurality of substrates in a batch processing system. The method includes loading the plurality of substrates into a process chamber of the batch processing system, depositing by atomic layer deposition (ALD) a first portion of a high-k dielectric film on the plurality of substrates, after depositing the first portion, and without removing the plurality of substrates from the process chamber, depositing by chemical vapor deposition (CVD) a second portion of the high-k dielectric film on the first portion, and removing the plurality of substrates from the process chamber. The method can further include alternatingly repeating the deposition of the first and second portions until the high-k dielectric film has a desired thickness. The method can still further include pre-treating the substrates and post-treating the high-k dielectric film in-situ prior to the removing.

The invention relates to a material increase manufacturing method for a titanium alloy shape part by using a double-arc hybrid heat source. The method comprises the following steps: MIG welding and TIG welding are originally combed, a welding wire as a melting electrode is sent out by an MIG welding gun and is subjected to surfacing on a base plate; an MIG power anode is connected with a TIG power anode, and an MIG power cathode is connected with the base plate, the MIG welding gun is connected with the MIG power anode, and a TIG welding gun is connected with a TIG power cathode; the MIG welding gun is in the front, and the TIG welding gun is in the back; the current of the welding wire is shunted through a TIG welding circuit, so that the current passing through the welding wire is large, and the current passing through a weldment is small. After the base plate completes a first surfacing layer, a hybrid welding gun is increased by a story height, and a second layer of shape part is welded; the above process is repeated, so that the titanium alloy shape part is formed by overlaying plurality of surfacing layer. The method has the advantages of being high in metal deposition rate, high in welding speed, less in weldment heat input, good in structural and mechanical properties of the shape part and low in cost and solves the problems of lager heat input, low welding speed, poor welding quality and low efficiency during material increase manufacturing of the traditional titanium alloy single TIG arc wire feeding.

A substrate is brought into close proximity with one or more gas injectors to deposit a thin film. As the substrate is moved horizontally along a predefined direction, it is injected with reactive gases and pyrolytically heated with a heating light focused on the substrate. To prevent photolytic reactions, the heating light source is preferably on the side of the substrate opposite to the side where the reactive gases are deposited. In some embodiments, this heating light source is supplemented by heating light sources on the same side of the substrate as the deposited reactive gases. The heating light source(s) has a wavelength to optimize absorption by the substrate or the deposited film layer.

Recessed features on a Damascene substrate are filled with metal using plasma PVD. Recessed features having widths of less than about 300 nm, e.g., between about 30-300 nm can be filled with metals (e.g., copper and aluminum), without forming voids. In one approach, the deposition is performed by exposing the substrate to a high-density plasma characterized by high fractional ionization of metal. Under these conditions, the metal is deposited within the recess, without forming large overhang at the opening of the recess. In some embodiments, the metal is deposited within the recess, while diffusion barrier material is simultaneously etched from the field region. In a second approach, recessed features are filled by performing a plurality of profiling cycles, wherein each cycle includes a net etching and a net depositing operation. Etching and depositing parameters are adjusted such that the recessed features are filled without forming overhangs and voids.

The invention relates to a welding technique in equipment manufacture industry, which is a welding speciality technique of a welding casing of an MCL-typed horizontal cutting centrifugal compressor, in particular to a welding process of the welding casing of the centrifugal compressor with low-temperature steel 09MnNiDR material at -70 DEG C. The gas protection welding is adopted; the welding wire grade is HS09MnNiDR and the diameter of the welding wire is Phi1.2mm; the polarity of the power supply is reversed DC power. The invention comprises a processing before welding, a welding process and a processing after welding; wherein, the process parameters in the welding process are that the welding current ranges from 150A to 200A, the welding voltage ranges from 24V to 28V, the protection gas is the mixed gas with 80% of Ar and 20% of CO2 according to the volume percentage, the welding speed ranges from 250mm/min to 280mm/min, the dry elongation ranges from 10mm to 15mm, and the gas flux ranges from 20L/min to 25L/min. The welding wire of the gas protection welding of the invention is not required to be dried, the welding wire is automatically fed in the welding process, and a welding rod is not required to be replaced; as the heat of the MAG melting polar gas protection welding is concentrated, the invention has the advantages of narrow thermal effect area, little deformation, beautiful forming, good quality, low cost, fast welding speed, high welding efficiency, etc.

The invention provides a dynamic twin-wire three-arc welding method, belonging to the technical field of welding. The invention solves the problem that contradictions exist between improvement of deposition rate and reduction of heat input in the existing arc welding methods. The method is characterized in that a wire feeder is adopted to automatically feed a first welding wire and a second welding wire into two welding wire tips respectively and the included angle between the two welding wires is ensured to be 0-90 degrees; one output end of a first variable polarity power source is connected with one welding wire tip; one output end of a second variable polarity power source is connected with the other welding wire tip; after being connected with each other, the other output end of the first variable polarity power source and the other output end of the second variable polarity power source are connected with a workpiece to be welded; and the phase difference between output signals of the first variable polarity power source and the second variable polarity power source is 180 degrees. The welding method is efficient.

The present invention discloses microwave electron cyclotron resonance plasma body chemical vapor deposition equipment, which comprises a microwave power source and a transmission system 101, a microwave resonance cavity 102, a coating chamber and a specimen stage system 103, a vacuum system 104, a gas circuit system 105, an automatic sheet transmission system 106, and a controlling system 107, wherein, magnetic field devices 306 which are lined at equal intervals are arranged in the microwave resonance cavity; the specimen stage system is arranged inside the coating chamber; the microwave resonance cavity, the vacuum system, and the automatic sheet transmission system are respectively connected with a coating chamber 809, the microwave power source and the transmission system are connected with the microwave resonance cavity; a controlling software is solidified in the host computer of the controlling system; the working states of the microwave power source and the transmission system, the coating chamber and the specimen stage system, the vacuum system, and the gas circuit system are respectively controlled through interfaces, and thus the deposition technological process of a film is completed. The present invention has the advantages that the big area uniformity is good, the deposition rate is high, the automaticity and the production efficiency are high, the reliability is good, the power loss is small, and the stability and the repeatability are good.

In order to solve the problems of welding deformation and hot cracks in the process of welding large-section aluminum buses and improve welding efficiency, the invention provides a horizontally laid large-section aluminum bus welding construction method. In the method, aluminum buses to be welded are paired and fixed, and arranged in a welding pool crystallization tank with a heater, semi-automatic metal inert-gas (MIG) double pulse argon arc welding is adopted, and an aluminum bar serving as a welding material is directly inserted into the welding pool for welding simultaneously; before welding, two ends of welding positions of the buses are pre-heated at the temperature of between 150 and 250DEG C; and in the welding process, the temperature of the welding positions of the aluminum buses is always kept in a range of 150-250DEG C. Compared with the prior art, the method has the advantages that: the temperature of the welding pool can be reduced and the welding speed can be improved by filling the welding material; and the crystallization tank heats the welding positions in the welding process, so that air holes of welding lines are reduced and the welding deformation and hot cracks are reduced.

The invention discloses a multi-wire (solid or flux-cored) bead welding system adopting an inert gas protection or submerged arc method, and a process of the multi-wire bead welding system. The multi-wire bead welding system and the process of the multi-wire bead welding system are used for replacing surfacing with band-electrode to obtainer higher production efficiency. The multi-wire bead welding system comprises a welding gun swing mechanism (11), a multi-wire welding gun (6), a wire-feeding pipe (4) and at least two wire-feeding machines (5). Compared with traditional bead welding, the multi-wire bead welding is higher in deposition rate. Due to the fact that a lap joint area of multi-wire bead welding is soother than that of traditional bead welding, the machining time needed to obtain a smooth surface is largely shortened. A machine head of the multi-wire bead welding system can swing in the welding process, the fusion ratio between bead welding materials and wood is improved while a wider weld joint is obtained, and the unique swing function can guarantee a bead welding layer to be more uniform.

A deposition system is provided, where conductive targets of similar composition are situated opposing each other. The system is aligned parallel with a substrate, which is located outside the resulting plasma that is largely confined between the two cathodes. A “plasma cage” is formed wherein the carbon atoms collide with accelerating electrons and get highly ionized. The electrons are trapped inside the plasma cage, while the ionized carbon atoms are deposited on the surface of the substrate. Since the electrons are confined to the plasma cage, no substrate damage or heating occurs. Additionally, argon atoms, which are used to ignite and sustain the plasma and to sputter carbon atoms from the target, do not reach the substrate, so as to avoid damaging the substrate.

The invention relates to a welding technology in the equipment manufacture industry and relates a special welding technology of an MCL (Mean Control Limit) type horizontally-split centrifugal compressor welder casing, in particular to a welding technology of a megaton ethane centrifugal compressor welder casing with forgeable pieces of 16 Mn and Q345R and ZQ230-450 materials. Gas shielded welding is adopted to weld the welder casing with the forgeable pieces of 16 and the Q345R low alloyed steel, and an electrode in a brand of H08Mn2SiS with a diameter shown in the specification, power supply polarity of DCRP (Direct Current Reverse Polarity) is adopted and comprises fore-welding treatment, welding process and post-welding treatment, wherein the welding process comprises the following process parameters: a welding current is 250-280 A, a welding voltage is 28-32 V, a protective mixed gas comprises 80 percent by volume of Ar and 20 percent by volume of CO2, a welding speed is 280-320 mm/min, the dry extension is 20-25 mm, and the gas flow is 15-20 L/min. The invention can solve the problems of welding deformation, layered tearing, low welding efficiency, and the like and ensure the welding seam strength by selecting an MAG (Metal Active Gas) shielded welding material with similar chemical contents and matched strength with a welder casing material.

The invention relates to a double-wire underwater wet welding device and a double-wire underwater wet welding method. The welding device comprises a master welding gun power supply, a slave welding gun power supply, a master wire conveyor, a slave wire conveyor, a master welding gun and a slave welding gun, wherein the master welding gun and the slave welding gun are respectively connected to the master welding gun power supply and a slave welding gun power supply, a master welding wire and a slave welding wire are respectively conveyed to the end parts of the master and slave welding guns through the master and slave wire conveyors, the master welding gun and the slave welding gun are respectively arranged to form a certain angle with a workpiece to be welded, and a certain distance is kept between the front end of the master welding gun and the front end of the slave welding gun. According to the double-wire underwater wet welding device and method, the two welding wires in the master and slave welding guns are heated mutually, and the energy of electric arc is fully used, so that the deposition rate is greatly improved, and the problem that the underwater wet welding molten bath and the base metal cannot be fully fused is overcome.

The invention relates to a 3D printing device and method for molten metal, and belongs to the technical field of 3D printing. The 3D printing device comprises a casing, a first nozzle, a melting-electrode welding electrode and a non-melting-electrode welding electrode, wherein the first nozzle is connected with one end of the casing; a cavity is formed in the middle part of the casing; a first sealing plate and a second sealing plate are arranged in the casing; the melting-electrode welding electrode and the non-melting-electrode welding electrode are positioned in the cavity of the casing; the melting-electrode welding electrode and the non-melting-electrode welding electrode penetrate through the two sealing plates to be arranged; the first sealing plate is provided with a gas inlet, and the second sealing plate is provided with a gas outlet; the gas inlet and the gas outlet are used for allowing noble gases to circulate. According to the 3D printing device and method disclosed by the invention, a wire material extruding hot melting forming manner and a melting forming manner based on fusion welding are creatively combined, high temperature generated by welding arcs enables high-melting-point metal wires to be melted to obtain molten metal, and under the extruding action of the inside pressure of the casing and the nozzle, the molten metal stably and quickly flows out, so that the 3D printing is realized.

The invention discloses a process for carrying out submerged arc welding on two plates with thicknesses of no more than 14 mm. The process comprises the following steps: after one part to be welded forms a groove, checking an assembling clearance between the two plates and making the assembling clearance satisfy requirements, fixing a gasket on the back face of an abutted part; enabling a variable speed submerged arc welding trolley to move along a welding joint at a constant speed; controlling a welding wire to swing backwards relative to the trolley in a reciprocating way at a constant speed in the direction of the welding joint when the welding wire on the trolley moves at the constant speed with the trolley; controlling the swinging amplitude of the welding wire, so that the swinging arc of the welding wire always falls within a range of a molten pool; and adjusting the height of the welding wire so as to guarantee that an electric arc can directly act upon the root of the groove when the welding wire is positioned at a swinging arc front point. According to the invention, the desired welding current is reduced, linear energy is also reduced, the expansion stress of the welding joint is reduced and cracks are uneasy to generate on a welding joint terminal; moreover, as the two sides of the side wall of the groove can be continuously heated by the electric arc, the deposition rate is increased, the production efficiency is increased, the electric quantity and the consumption of the welding material are reduced and the production cost is reduced.

The invention provides a film plating device for preparing a TCO film and a film plating method. The film plating device integrates an ion film plating source with a sputtering film plating source in the same vacuum equipment. Characteristics of ion film plating and sputtering film plating are combined effectively, TCO films of different optical and electrical properties are prepared continuously under the condition that the films are not exposed in the atmosphere according to different requirements for the TCO films of devices, a high deposition speed is obtained, and damage on a substrate and the device surface caused in the film deposition process is reduced. The device and method are especially suitable for preparing the TCO films continuously in the front and back sides of high-efficiency film silicon/crystalline silica heterojunction solar cells with low loss as well as preparing different TCO films continuously in different film solar cells; and the device and method are suitable for different TCO materials with different performances.

A deposition system is provided, where conductive targets of similar composition are situated opposing each other. The system is aligned parallel with a substrate, which is located outside the resulting plasma that is largely confined between the two cathodes. A “plasma cage” is formed wherein the carbon atoms collide with accelerating electrons and get highly ionized. The electrons are trapped inside the plasma cage, while the ionized carbon atoms are deposited on the surface of the substrate. Since the electrons are confined to the plasma cage, no substrate damage or heating occurs. Additionally, argon atoms, which are used to ignite and sustain the plasma and to sputter carbon atoms from the target, do not reach the substrate, so as to avoid damaging the substrate.

A method for repairing open arc welding and surfacing of a continuous casting roller of a continuous casting fan-shaped section includes the following steps of (1) welding material selection, (2) open arc welding and surfacing processing and (3) roller surface welding. By means of the method for repairing open arc welding and surfacing, a surfacing layer of the continuous casting roller has high anti-stripping performance, good abrasion resistance, good fatigue resistance and good machinable performance, production efficiency is high due to surfacing, the requirement for multiple times of surfacing repairing can be met, and the service life of the continuous casting roller after surfacing repairing is not shorter than that of an original roller.

The invention discloses an anti-crack wear-resistant overlaying welding flux-cored wire, which consists of a scarfskin and a flux core, wherein the flux core consists of the following ingredients in percentage by mass: 40 to 50 percent of Cr, 3 to 10 percent of Ni, 5 to 10 percent of Mn, 5 to 10 percent of Si, 4 to 10 percent of CaF2, 5 to 10 percent of Li2CO3, 10 to 15 percent of Al/Mg alloy and the balance Fe. The invention also discloses a preparing method of the anti-crack wear-resistant overlaying welding flux-cored wire. According to the method, flux-cored ingredients are uniformly mixed and are then dried, next, the dried flux-cored ingredients are added into a U-shaped groove rolled by an H08A steel band, then, roller compaction and closed straightening are carried out, finally, the straight pulling is carried out, and the anti-crack wear-resistant overlaying welding flux-cored wire is obtained after the packaging. The anti-crack wear-resistant overlaying welding flux-cored wire has the advantages that the hardness and the wearing resistance are ensured, meanwhile, the occurrence of overlaying welding layer cracks is avoided, an overlaying welding layer has certain toughness, better welding manufacturability is realized, welding spattering is little, and the deposition rate is high; the anti-crack wear-resistant overlaying welding flux-cored wire is suitable for automatic welding equipment, the production efficiency is higher, in addition, the preparing method is simple, and the operation is convenient.

The invention relates to a piston with a (Ti, Al)N multilayer heat insulating and wear resisting super-thick coating on the surface and a preparation technology and application of the piston. The structure of the piston comprises two schemes. According to the first scheme, the piston comprises a base, a TiAl transition layer and a TiAlN clad layer, and the TiAl transition layer evenly wraps the base; and the TiAlN clad layer evenly wraps the TiAl transition layer. According to the second scheme, the piston comprises a base, a first TiAl transition layer, a first TiAlN clad layer, a second TiAltransition layer and a second TiAlN clad layer, and the piston structurally comprises the base, the first TiAl transition layer, the first TiAlN clad layer, the second TiAl transition layer and the second TiAlN clad layer in sequence. According to application of the piston, the piston is used for an internal combustion engine. The designed piston surface has heat insulation performance, wear resistance, oxidation resistance and heat shock resistance, and the service life of the piston is effectively prolonged.

The invention discloses a device and a method for improving film thickness uniformity. Wafer placing heating platforms in two technological chambers of a PECVD (Plasma Enhanced Chemical Vapor Deposition) machine are designed as rotary platforms of which the speeds can be controlled by programs; through setting of the rotation speeds of the platforms, the wafers are guaranteed to rotate for an integer number of turns within the technological time, so that influence of radio frequency overlap between the two chambers on the peripheries of the whole wafers is uniform, films around the wafers areuniformly distributed, and sudden change, caused by the radio frequency overlap, of the film thickness is eliminated; by virtue of a characteristic that the radio frequency overlap can increase the film deposition rate, the film thickness difference between the centers and the edges of the films is reduced, so that the film thickness throughout the whole wafers is more uniform.