179results about How to "Rapid temperature measurement" patented technology

An in-situ hybrid film deposition method for forming a high-k dielectric film on a plurality of substrates in a batch processing system. The method includes loading the plurality of substrates into a process chamber of the batch processing system, depositing by atomic layer deposition (ALD) a first portion of a high-k dielectric film on the plurality of substrates, after depositing the first portion, and without removing the plurality of substrates from the process chamber, depositing by chemical vapor deposition (CVD) a second portion of the high-k dielectric film on the first portion, and removing the plurality of substrates from the process chamber. The method can further include alternatingly repeating the deposition of the first and second portions until the high-k dielectric film has a desired thickness. The method can still further include pre-treating the substrates and post-treating the high-k dielectric film in-situ prior to the removing.

A heat exchanger structure of an automatic transmission stabilizing a temperature of oil is provided. A heat exchanger structure of an automatic transmission includes an automatic transmission, a first heat exchanger provided on an upstream side and a second heat exchanger provided on a downstream side, each capable of cooling oil ejected from the automatic transmission, and a thermo valve capable of supplying oil subject to heat exchange by at least one of first and second heat exchangers to the automatic transmission. When a temperature of the oil is relatively low, the thermo valve supplies oil passed through the first heat exchanger to the automatic transmission and shuts off a flow of oil from the second heat exchanger to the automatic transmission. When a temperature of the oil is relatively high, the thermo valve supplies oil passed through first and second heat exchangers to the automatic transmission.

Providing: quickly brining a vapor cell 119 to a desired temperature when retaining the heat of the vapor cell 119 to enhance the magnetic field detection performance of an optically pumped magnetometer; preventing adherence of atoms in the vapor cell 119 to a laser irradiation light passing-through part of the vapor cell 119; downsizing the periphery of the vapor cell 119; and suppressing the effect of a magnetic field from a heater used to retain the heat of the vapor cell 119. The present invention includes: a transparent film heater 118 provided to a laser irradiation light passing-through part of a vapor cell 119, the vapor cell 119 being a magnetic detection part of the optically pumped magnetometer; a temperature detector 115 provided at a center part of a side of the vapor cell 119; a temperature regulator 111 that sets a desired temperature for heat retention of the vapor cell 119 and compares the desired temperature and the actual temperature of the vapor cell measured by the temperature detector 115; an operation unit 112 that upon receipt of a PID control signal for temperature control from the temperature regulator 111, performs a temperature adjustment and switches on / off, in a pulsed manner, current applied to the transparent film heater 118 after the desired temperature is reached; and a heater power supply 113 that upon receipt of an operation signal from the operation unit 112, applies current to the transparent film heater 118.

A method and an apparatus utilized for thermal processing of substrates during semiconductor manufacturing. The method includes heating the substrate to a predetermined temperature using a heating assembly, cooling the substrate to the predetermined temperature using a cooling assembly located such that a thermal conductance region is provided between the heating and cooling assemblies, and adjusting a thermal conductance of the thermal conductance region to aid in heating and cooling of the substrate. The apparatus includes a heating assembly, a cooling assembly located such that a thermal conductance region is provided between the heating and cooling assemblies, and a structure or configuration for adjusting a thermal conductance of the thermal conductance region.

An exhaust gas cleaning system of a diesel engine includes a diesel particulate filter (a DPF) disposed in an exhaust passage, and a diesel oxidation catalyst (a DOC) disposed upstream of the DPF. When an electronic control unit (an ECU) performs a temperature increasing operation such as post-injection to eliminate particulate matters accumulated in the DPF, a ratio (a duty ratio) between a performing period and an interrupting period of the temperature increasing operation is changed in accordance with temperature of the DPF. Thus, a quantity of hydrocarbon supplied to the DOC is controlled stepwise or continuously. Thus, the temperature of the DPF can be increased to target temperature quickly and can be maintained near the target temperature when the regeneration of the DPF is performed.

An ECU has an enclosure which is contained in the casing of an automatic transmission, which is formed of a material having low heat conductivity, and which provides liquid-tight containment of a substrate. A heat sink is attached to the substrate so as to dissipate heat from an electronic circuit on the substrate. The heat sink is attached in contact with an inner wall surface of the enclosure, so that heat produced by the electronic circuit is dissipated via the heat sink and the enclosure.

The present invention relates to a multiwell strip comprising a frame portion consisting of a first stiff material, and a plurality of wells arranged in a line and consisting of a second material, which is not as stiff as the first material. Furthermore, the present invention relates to a multiwell-frame for obtaining a multiwell strip according to the present invention and methods for producing a multiwell strip according to the present invention.

A thermoelectric component includes a first and a second element which, in the vicinity of a contact point, are in contact with each other, e.g., in the form of a thermal contact. Furthermore, in this connection, first element and / or second element have a ceramic material at least in one vicinity of contact point. The component may be suitable as a thermocouple for measuring temperature based on the Seebeck effect, or for use in a Peltier element as a thermoelectric heating element or cooling element based on the Peltier effect.

An ion mobility spectrometer includes a protective housing. A drift tube having at least one inlet and at least one outlet confines a drift gas. An ion gate is positioned in the drift tube. The ion gate defines a reaction region and a drift region in the drift tube. An ion detector is positioned in the drift tube downstream of the ion gate at an end of the drift region. A helical resistive wire coil is positioned around the drift tube. A power supply generates an electric field in the helical resistive wire coil that rapidly controls the temperature of the drift gas.