Temperature control device
a temperature control device and temperature control technology, applied in the direction of lighting and heating apparatus, instruments, domestic cooling devices, etc., can solve the problems of inability to quickly change the temperature control device requires a long period of time in order, and the temperature inside the temperature adjustment unit b> cannot be changed quickly
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first embodiment
[0054]A first embodiment of the temperature control device according to the present invention will be described below with reference to the drawings.
[0055]FIG. 1 shows the overall construction of the temperature control device according to the present embodiment.
[0056]The illustrated temperature control device is employed in, for example, processes / manufacturing steps in the bioengineering field and the chemical engineering field, bioengineering / chemical experimentation, and manufacturing processes for precision machinery such as semiconductor devices, etc. The temperature control device comprises a temperature adjustment plate 10. The temperature adjustment plate 10 exchanges heat energy with a controlled object by supporting a controlled object placed thereon. More specifically, a pathway (temperature adjustment unit 11) is provided in the interior of the temperature adjustment plate 10, and has a non-compressible fluid flowing therein (preferably a liquid medium (liquid temperatu...
second embodiment
[0110]A second embodiment will be described below with reference to the drawings that are focused on the points that differ from the first embodiment.
[0111]FIG. 8 shows the overall construction of the temperature control device according to the present embodiment. As illustrated, in the present embodiment, a discharge pathway 60 that allows fluid to flow circumventing the cooling valve 24 is connected between the upstream and downstream sides of the cooling valve 24 along the cooling pathway 20. In addition, a discharge pathway 62 allows fluid to flow circumventing the heating valve 44 is connected between the upstream and downstream sides of the heating valve 44 along the heating pathway 40.
[0112]These discharge pathways 60 and 62 are sufficiently smaller than the path dimensions of either of the cooling pathway 20 and the heating pathway 40. This is in order to allow the discharge pathways 60 and 62 to discharge a minute amount of fluid from the upstream side of the cooling pathwa...
third embodiment
[0117]A third embodiment will be described below with reference to the drawings that are focused on the points that differ from the first embodiment.
[0118]FIG. 9 shows the relationship between the basic manipulating variable MB according to the present embodiment and the opening ratio Va, Vb and Vc of the cooling valve 24, the bypass valve 34, and the heating valve 44. As illustrated, in the present embodiment, the opening ratio Va of the cooling valve 24 and the opening ratio Vc of the heating valve 44 are set so as not to be in a completely closed state. In other words, the opening ratio Va of the cooling valve 24 will monotonically decrease in accordance with an increase in the basic manipulating variable MB when the basic manipulating variable MB is less than zero, and will be at the smallest opening ratio (>0) when the basic manipulating variable MB is zero or more. In addition, the opening ratio Vc of the heating valve 44 will monotonically increase in accordance with an incre...
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