Nonlinear left-handed transmission-line frequency multiplier based on planar technology and preparation method thereof
The technology of a nonlinear transmission line and its production method is applied in the field of left-handed nonlinear transmission line frequency multiplier and its production. On-chip integration, easy implementation, and good circuit stability
Active Publication Date: 2011-06-08
北京中科微投资管理有限责任公司
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Problems solved by technology
[0004] The present invention aims at the problem that the nonlinear transmission line realized by the traditional manufacturing method of the left-handed nonlinear transmission line frequency multiplier is complicated in structure and cannot be processed in batche
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[0040] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.
[0041] see Figure 1 to Figure 10 , an embodiment of the present invention provides a method for manufacturing a left-handed nonlinear transmission line frequency multiplier based on a planar process, and the method includes the following steps:
[0042] Step 10: Fabricate a Schottky varactor 113 on the semi-insulating substrate 101, the Schottky varactor 113 includes a heavily doped N-type layer 102 disposed on the semi-insulating substrate 101, set The N-type layer 103 and the lower electrode 105 on the heavily doped N-type layer 102, the upper electrode 104 arranged on the N-type layer 103, the N-type layer 103 on the heavily doped N-type layer The heavily doped N-type layer 102 forms a mesa structure on the sem...
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The invention relates to a nonlinear left-handed transmission-line frequency multiplier based on a planar technology and a preparation method thereof, which belongs to the technical field of microwave circuits. The preparation method comprises the following steps of: preparing a Shottky variable capacitance diode on a semi-insulating substrate, wherein the Shottky variable capacitance diode comprises a heavily doped N-type layer, an N-type layer, a lower electrode and an upper electrode, the N-type layer forms a mesa structure on the heavily doped N-type layer, and the heavily doped N-type layer forms a mesa structure on the semi-insulating substrate; forming a lower electrode of a capacitor and a buried layer lead wire of an inducer on the semi-insulating substrate; depositing to form a dielectric layer; etching the dielectric layer at the upper electrode, the lower electrode, the lower electrode of the capacitor and the buried layer lead wire of the inducer to form a window; and forming the lower electrode of the capacitor, a spiral inductor and a connecting wire. The preparation method of the nonlinear left-handed transmission-line frequency multiplier based on the planar technology adopts the planar technology, is easy to be performed and operated and easy for monolithic integration and has high integration level, good circuit stability and high circuit reliability.
Description
technical field [0001] The invention relates to a left-handed nonlinear transmission line frequency multiplier and a manufacturing method thereof, in particular to a plane-based left-handed nonlinear transmission line frequency multiplier and a manufacturing method thereof, belonging to the technical field of microwave circuits. Background technique [0002] The left-hand nonlinear transmission line frequency multiplier is a circuit structure that generates frequency multiplication effects through the nonlinearity of passive components such as variable capacitors and inductors. The structure is composed of a single or several transmission line units, and each unit is composed of a series variable capacitance and a parallel inductance. Correspondingly, the traditional nonlinear transmission line unit consists of series inductors and parallel variable capacitors. Compared with traditional nonlinear transmission lines, this left-handed nonlinear transmission line has a higher ...
Claims
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Inventor 董军荣杨浩黄杰田超张海英
Owner 北京中科微投资管理有限责任公司